Radio frequency thin film characterization with polymer-coated Love-wave sensor

A passive radio-frequency identification (RFID) gas sensor with self-correction against fluctuations of ambient temperature

“…2. This material is a dielectric polymer with a glass transition temperature below room temperature [41, 44]. …”

Enhanced bio-inspired microsensor based on microfluidic/bacteria/love wave hybrid structure for continuous control of heavy metals toxicity in liquid medium

“…For each delay line, both Interdigital Transducers (IDTs) used for piezoelectric emission and reception of acoustic wave are made by sputtering 70 nm of gold on a 30 nm titanium layer to achieve a good are made by sputtering 70 nm of gold on a 30 nm titanium layer to achieve a good surface adhesion. IDTs are composed of 44 Ti/Au splitted-finger pairs with a periodicity ( ) of 40 m. The acoustic path length is 164 (between both IDTs), and the IDTs aperture (W) is 39 [24]. A 4 m plasma enhanced chemical vapor deposited (PECVD) SiO 2 layer is used as the guiding layer.…”

P2.1.16 Optimization of physicochemical parameters of a multilayered polyelectrolyte film deposition with Love wave and AFM for bacteria based detection of heavy metals

“…An AT-cut quartz substrate with interdigitated electrodes (IDTs) parallel to the crystallographic X-axis (Euler Angles: 0°; 121.5°, 90°), permits to generate pure shear horizontal (SH) waves, and so to work with an adjacent liquid medium. A 4 µm SiO 2 guiding layer was added in order to trap acoustic energy and to generate guided SH-SAW or Love wave [6].…”