The quanta image sensor (QIS) is a photoncounting image sensor that has been implemented using different electron devices, including impact ionizationgain devices, such as the single-photon avalanche detectors (SPADs), and low-capacitance, high conversion-gain devices, such as modified CMOS image sensors (CIS) with deep subelectron read noise and/or low noise readout signal chains. This article primarily focuses on CIS QIS, but recent progress of both types is addressed. Signal processing progress, such as denoising, critical to improving apparent signal-to-noise ratio, is also reviewed as an enabling coinnovation.Index Terms-CMOS image sensor (CIS), denoising, image quality, low-light sensor, photon-counting image sensor, quanta image sensor (QIS), subelectron read noise.
I. INTRODUCTIONC OUNTING every photon is as sensitive as physics presently allows in measuring light. To count photons incident on the faceplate, optical losses must be minimized, detector quantum and collection efficiencies must be maximized, and detector dead times minimized. Measurement of ultralow quanta (light) flux using single photomultiplier tube (PMT) detector photon counting was suggested as early as the 1960s, e.g., [1]-[3]. A digital photon-counting image sensor using APDs was suggested by Nippon Hōsō Kyōkai (NHK) [4]. In 1996, a hybridized photon-counting image sensor readout integrated circuit (ROIC) was investigated by Jet Propulsion Laboratory (JPL) [5] and the first solid-state single-photon avalanche detector (SPAD) was introduced [6].