In several emerging fields of study such as encryption in optical communications, determination of the number of photons in an optical pulse is of great importance. Typically, such photon-number-resolving sensors require operation at very low temperature (e.g., 4 K for superconducting-based detectors) and are limited to low pixel count (e.g., hundreds). In this paper, a CMOS-based photon-counting image sensor is presented with photon-number-resolving capability that operates at room temperature with resolution of 1 megapixel. Termed a quanta image sensor, the device is implemented in a commercial stacked (3D) backside-illuminated CMOS image sensor process. Without the use of avalanche multiplication, the 1.1 μm pixel-pitch device achieves 0.21e− rms average read noise with average dark count rate per pixel less than 0.2e− ∕s, and 1040 fps readout rate. This novel platform technology fits the needs of high-speed, high-resolution, and accurate photon-counting imaging for scientific, space, security, and low-light imaging as well as a broader range of other applications.

The first quanta image sensor jot with photon counting capability is demonstrated. The low-voltage device demonstrates less than 0.3e-r.m.s. read noise on a single read out without the use of avalanche gain and single-electron signal quantization is observed. A new method for determining read noise and conversion gain is also introduced.

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The Quanta Image Sensor (QIS) was conceived when contemplating shrinking pixel sizes and storage capacities, and the steady increase in digital processing power. In the single-bit QIS, the output of each field is a binary bit plane, where each bit represents the presence or absence of at least one photoelectron in a photodetector. A series of bit planes is generated through high-speed readout, and a kernel or “cubicle” of bits (x, y, t) is used to create a single output image pixel. The size of the cubicle can be adjusted post-acquisition to optimize image quality. The specialized sub-diffraction-limit photodetectors in the QIS are referred to as “jots” and a QIS may have a gigajot or more, read out at 1000 fps, for a data rate exceeding 1 Tb/s. Basically, we are trying to count photons as they arrive at the sensor. This paper reviews the QIS concept and its imaging characteristics. Recent progress towards realizing the QIS for commercial and scientific purposes is discussed. This includes implementation of a pump-gate jot device in a 65 nm CIS BSI process yielding read noise as low as 0.22 e− r.m.s. and conversion gain as high as 420 µV/e−, power efficient readout electronics, currently as low as 0.4 pJ/b in the same process, creating high dynamic range images from jot data, and understanding the imaging characteristics of single-bit and multi-bit QIS devices. The QIS represents a possible major paradigm shift in image capture.

A new photodetector designed for Quanta image sensor application is proposed. The photodetector is a backside-illuminated, buried photodiode with a vertically integrated pump and transfer gate and a distal floating diffusion to reduce parasitic capacitance. The structure features compact layout and high conversion gain. The proposed device is modeled and simulated, and its performance characteristics estimated.INDEX TERMS CMOS image sensor, Quanta image sensor (QIS), jot, pump gate, full well capacity, high conversion gain.