RSC Adv.
 2015
DOI: 10.1039/c5ra10741e
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Rapid synthesis of nc-Si/a-SiNx:H QD thin films by plasma processing for their cost effective applications in photonic and photovoltaic devices

Debajyoti Das
1
,
Basudeb Sain
2

Abstract: A rapid and single step synthesis of nc-Si/a-SiNx:H QD thin films has been made possible from a (SiH4 + NH3) gas mixture, with the advent of high density low pressure planar inductively coupled plasma processing.

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Cited by 10 publications
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References 52 publications
(53 reference statements)
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Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD

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Das
2
2022
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Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD

Paramanik
1
,
Das
2
2022
Applied Surface Science
22
0
4
0
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Room temperature synthesized highly conducting B-doped nanocrystalline silicon thin films on flexible polymer substrates by ICP-CVD

Patra
1
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Das
2
2022
Applied Surface Science
4
0
0
0
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Structural studies of n-type nc-Si–QD thin films for nc-Si solar cells

Das
1
,
Kar
2
2017
Journal of Physics and Chemistry of Solids
11
1
3
0
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