Rapid thermal annealing effects on the structural and optical properties of ZnO films deposited on Si substrates

Lee, Yueh-Chien; Hu, Sheng-Yao; Water, Willem van de; Tiong, K. K.; Feng, Zhe-Chuan; Chen, Yen‐Ting; Huang, Jiansheng; Lee, Jyh-Wei; Huang, Chia‐Chien; Shen, Jyi-Lai; Cheng, Mou-Hong

doi:10.1016/j.jlumin.2008.09.003

Cited by 97 publications

(36 citation statements)

References 26 publications

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“…C -1 ) and gold catalyst (α = 14 x 10 -6. C -1 ) [20]. We supposed that due to large different in the thermal expansion coefficient, as the annealing temperature increased, the residual stress also increased and shifting the diffraction angle to right.…”

Section: Methodsmentioning

confidence: 96%

Heat treatment effects on the surface morphology and optical properties of ZnO nanostructures

Sahdan

Mamat

Muhamad

et al. 2010

Phys. Status Solidi (c)

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Zinc oxide (ZnO) nanostructures have received broad attention due to its wide applications especially for thin‐film solar cells and transistors. In this paper, we report the effects of heat treatment on the structural and optical properties of ZnO nanostructures. Zinc oxide nanostructures were synthesized using thermal chemical vapour deposition (CVD) method on glass substrate. The surface morphologies which were observed by scanning electron microscope (SEM) show that ZnO nanostructures change its shape and size when the annealing temperature increases from 400 °C to 600 °C. Structural measurement using X‐ray diffraction (XRD) has shown that ZnO nanostructures have the highest crystallinity and smallest crystallite size (20 nm) when annealed at 550 °C. Furthermore, the samples were optically characterized using Photoluminescence (PL) spectrometer. The PL spectra indicate that ZnO nanostructures have the highest peak at UV wavelength when annealed at 550 °C. The mechanism of the PL properties of ZnO nanostructures is also discussed. We conclude that ZnO nanostructures deposited using thermal CVD have the optimum structural and PL properties when annealed at 550 °C. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Section: Methodsmentioning

confidence: 96%

Heat treatment effects on the surface morphology and optical properties of ZnO nanostructures

Sahdan

Mamat

Muhamad

et al. 2010

Phys. Status Solidi (c)

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“…Y. C. Lee et al deposited ZnO thin films on Si substrate following RTA with different annealing time. The PL spectrum revealed a significant improvement in the UV luminescence of ZnO films following RTA for 1 min [12]. X. Q. Wei et al reported structure and defects analysis of ZnO thin films deposited by PLD method and annealed in different ambients [13].…”

Section: Introductionmentioning

confidence: 98%

Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method

Huang

Yang

et al. 2011

J Electroceram

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We studied the effects of rapid thermal annealing in different ambients on the structural, electrical and optical properties of the sol-gel derived ZnO thin films. All the films after annealing showed highly degree of (002) oriented in the X-ray diffractometry (XRD) patterns. The effects of annealing ambients on electrical properties of the films were studied. Carrier concentration, resistivity and mobility were found to be distinguished after annealed in different ambients. The sample with the lowest resistivity of 0.095 Ω·cm and the largest mobility of 105.1 cm 2 /v·s was achieved after annealing in vacuum. XPS results indicated that more oxygen vacancies existed on the ZnO surface when annealed in vacuum than that in O 2 .

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“…1(a), the in-plane stress () can be calculated using the biaxial strain model [39]. In a hexagonal system such as ZnO, is deduced from the c-axis stress as follows [41]:…”

Section: Resultsmentioning

confidence: 99%

Structural-crossover-induced optical band gap variation of Hf-doped ZnO films

Bae

Jeong

Park

2014

Applied Surface Science

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Rapid thermal annealing effects on the structural and optical properties of ZnO films deposited on Si substrates

Cited by 97 publications

References 26 publications

Heat treatment effects on the surface morphology and optical properties of ZnO nanostructures

Heat treatment effects on the surface morphology and optical properties of ZnO nanostructures

Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method

Structural-crossover-induced optical band gap variation of Hf-doped ZnO films

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