Rapid thermal-plasma annealing of ZnO:Al films for silicon thin-film solar cells

Ohta, Nobuyoshi; Ohba, Daisuke; Sato, Shunsuke; Tang, Zeguo; Shimizu, Hirokazu; Shirai, Hajime

doi:10.1016/j.tsf.2011.04.043

Cited by 22 publications

(18 citation statements)

References 32 publications

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“…Therefore, the research in this field (the influence of the growth parameters, and subsequent heat treatment on the properties and the stability of the films) is intensively conducted [19][20][21][22]. Al/ZnO is easy to fabricate with various deposition methods, e.g.…”

Section: Introductionmentioning

confidence: 99%

“…Al/ZnO is easy to fabricate with various deposition methods, e.g. thermal evaporation [17], chemical vapour deposition (CVD) [18], plasma-enhanced chemical vapour deposition (PECVD) [19], sol-gel [20], spray pyrolysis [21], and magnetron sputtering [22,23]. Among sputtering methods, continuous direct current (dc) magnetron sputtering is the simplest and has many advantages such as a higher deposition rate and an easier operation than radio frequency magnetron sputtering.…”

Section: Introductionmentioning

confidence: 99%

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Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

et al. 2014

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Al-doped ZnO (Al/ZnO) thin film is a promising alternative to an ITO electrode in solar cell applications due to its low price, non-toxicity and other promising properties. In this paper, Al/ZnO thin films at different substrate temperatures were deposited on glass substrates as transparent conducting (TCO) films by DC magnetron sputtering. The effect of substrate temperature on the structural, morphological and optical properties of Al/ZnO films was investigated. X-ray diffraction (XRD) analysis suggests that crystal structure characteristics of synthesized thin films depend on the substrate temperature. The structure growth and variation in surface roughness with increasing substrate temperature are revealed by scanning electron microscope (SEM) micrographs and atomic force microscopy (AFM) analyses. Thicknesses of the deposited films were also examined by surface profiler. Moreover, obtained results from optical transmission patterns revealed that with the increasing substrate temperature, optical transmittance decreases.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

et al. 2014

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“…Other mechanisms, such as reduction of point defects and activation of the Al from Al-oxide phase 36,37 are also possible and should not be disregarded. For example, Kim et al 37 showed activation of Al dopants through deoxidation of Aloxides, after annealing ZnO:Al films at 900 C for 3 mins.…”

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confidence: 99%

Improved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer

Ponomarev

Sharma

Verheijen

et al. 2012

Journal of Applied Physics

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Improved conductivity of aluminum-doped Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Related ArticlesHigh Si and Ge n-type doping of GaN doping -Limits and impact on stress Appl. Phys. Lett. 100, 122104 (2012) Generalized conductivity model for polar semiconductors at terahertz frequencies Appl. Phys. Lett. 100, 122103 (2012) Numerical analysis of formation properties of a high-field dipole domain for submicron GaAs field-effect transistor devices J. Appl. Phys. 111, 054513 (2012) Thermoelectric properties of Zn-doped GaSb J. Appl. Phys. 111, 043704 (2012) Efficient room-temperature spin detector based on GaNAs

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“…ZnO thin films have many advantages: high chemical and mechanical stability, nontoxic in nature, high abundance, and transparency over other oxide thin films like ITO, CdO, SnO 2 , etc. ZnO is used as transparent conductive oxide (TCO) thin films, mainly in solar cells (Ohta et al 2011), heat mirrors, and organic light emitting diodes (Gong et al 2010;Yoo et al 2008). It can also be used as piezo electric devices and gas sensors (Kang and Joung 2007;Ferro 2009).…”

Section: Introductionmentioning

confidence: 99%

Effect of annealing on the properties of zinc oxide nanofiber thin films grown by spray pyrolysis technique

2013

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Zinc oxide nanofiber thin films have been deposited on glass substrate by spray pyrolysis technique. The X-ray diffraction studies revealed that the films are polycrystalline with the hexagonal structure and a preferred orientation along (002) direction for films annealed for 1 h at 450°C. Further increase in annealing time changes the preferred orientation to (100) direction. The scanning electron microscopic analysis showed the formation of ZnO nanofiber with an average diameter of approximately 800 nm for annealed films. The compositional analysis of nanofiber ZnO thin films were studied by time of flight secondary ion mass spectroscopy, which indicated oxygen deficiency in the films. The optical properties of annealed films have shown a variation in the band gap between 3.29 and 3.20 eV. The electrical conductivity of the as grown and annealed films showed an increase in the conductivity by two orders of magnitude with increase in annealing duration.

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Rapid thermal-plasma annealing of ZnO:Al films for silicon thin-film solar cells

Cited by 22 publications

References 32 publications

Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

Improved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer

Effect of annealing on the properties of zinc oxide nanofiber thin films grown by spray pyrolysis technique

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