Rational selection of the oxygen source for atomic layer deposition Al2O3 insulators

Chen, Xue; Wu, Rongliang; Wan, Jiaxian; Wu, Hong‐Wei; Wu, Hao; Liu, Chang

doi:10.1016/j.vacuum.2023.112315

Vacuum

2023

DOI: 10.1016/j.vacuum.2023.112315

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Rational selection of the oxygen source for atomic layer deposition Al2O3 insulators

Xue Chen

Rongliang Wu

Jiaxian Wan

et al.

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2024

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Er3+-Yb3+-Tm3+ tri-doped La2O3-Al2O3 glasses for low-power-consumption ultrawideband on-chip optical waveguide amplifiers

Li,

Zhang,

Chen

et al. 2024

Adv. Photon. Nexus

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In the field of short-range optical interconnects, the development of low-power-consumption, ultrawideband on-chip optical waveguide amplifiers is of critical importance. Central to this advancement is the creation of host materials that require low pump power and provide ultrabroadband emission capabilities. We introduce a tri-doped lanthanum aluminate glass (composition:, which exhibits exceptional near-infrared (NIR) luminescence intensity, significantly outperforming other bands by 3 orders of magnitude. This glass can achieve an ultrawideband NIR gain spanning 478 nm, from 1510 to 1988 nm. Notably, the glass achieves positive optical gain with a low population inversion threshold (P > 0.2), highlighting its efficiency and low-power consumption. The high glass transition temperature (T g ∼ 842°C) and large temperature difference (ΔT ∼ 120°C) between T g and the onset of crystallization (T x ) indicate excellent thermal stability, which is crucial for producing high-quality amorphous films for on-chip amplifiers. This research examines the unique energy levels and spectral properties of the Er 3þ -Yb 3þ -Tm 3þ tri-doped glass, assessing its potential for use in ultrawideband on-chip optical waveguide amplifiers. This work lays the groundwork for low-power, ultrabroadband on-chip waveguide amplifiers, offering new avenues for short-range optical interconnect systems.

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Er3+-Yb3+-Tm3+ tri-doped La2O3-Al2O3 glasses for low-power-consumption ultrawideband on-chip optical waveguide amplifiers

Li,

Zhang,

Chen

et al. 2024

Adv. Photon. Nexus

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Rational selection of the oxygen source for atomic layer deposition Al2O3 insulators

Cited by 1 publication

References 31 publications

Er3+-Yb3+-Tm3+ tri-doped La2O3-Al2O3 glasses for low-power-consumption ultrawideband on-chip optical waveguide amplifiers

Er3+-Yb3+-Tm3+ tri-doped La2O3-Al2O3 glasses for low-power-consumption ultrawideband on-chip optical waveguide amplifiers

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