Abstract:Rayleigh surface waves propagating in (111) Si substrate decorated with Ni phononic nanostructure AIP Conf.The specific features of the Rayleigh wave reflection from single surface imperfections of an isotropic substrate are studied by the finite element method. Six types of the imperfections are considered, namely, upstep and downstep, projection and groove, and strip of foreign material coating the substrate and buried into it. The dependence is found and analyzed of the absolute value and the phase of the r… Show more
“…The reflection and the transmission coefficients are found by the spacial Fourier transform of the displacement field on the free surface of the substrate. Our estimations yield that the error in the determination of these coefficients does not exceed 2-3% (see [3]- [8] for more detail). The resonant reflection is considered for the Z-cut of AlN (symmetry 6mm).…”
The SAW reflection from a strip (Pt, Al) deposited on a half-infinite substrate (Z-cut AlN) is numerically studied. The strip-substrate contact forms an acoustic waveguide supporting leaky modes propagating faster than SAW on the free surface of the substrate. The excitation of a leaky mode by SAW leads to a singular behavior of the reflection and the transmission coefficients. The dependence is investigated of the magnitude and the phase of these coefficients on the angle of incidence, the frequency, the width and the thickness of the strip. Two types of leaky waveguide modes are considered: Love-wave type mode and LLSAW type mode.
“…The reflection and the transmission coefficients are found by the spacial Fourier transform of the displacement field on the free surface of the substrate. Our estimations yield that the error in the determination of these coefficients does not exceed 2-3% (see [3]- [8] for more detail). The resonant reflection is considered for the Z-cut of AlN (symmetry 6mm).…”
The SAW reflection from a strip (Pt, Al) deposited on a half-infinite substrate (Z-cut AlN) is numerically studied. The strip-substrate contact forms an acoustic waveguide supporting leaky modes propagating faster than SAW on the free surface of the substrate. The excitation of a leaky mode by SAW leads to a singular behavior of the reflection and the transmission coefficients. The dependence is investigated of the magnitude and the phase of these coefficients on the angle of incidence, the frequency, the width and the thickness of the strip. Two types of leaky waveguide modes are considered: Love-wave type mode and LLSAW type mode.
“…These amplitudes are calculated, like in our earlier papers [28][29][30][31][32][33], with the help of the spacial Fourier transform by extracting the harmonic k x ¼ Àk I of the displacement u SC;z ðr; tÞ at z ¼ 0 and the harmonic k z ¼ Àk T of the displacement u SC;x ðr; tÞ at x ¼ 0, respectively. The reflection and the transmission coefficients are defined as the ratio of the normal component of the mechanical displacement of the corresponding wave to the normal component of the mechanical displacement of the incident SAW.…”
“…If the substrate is isotropic, then the electric potential is merely left from considerations. [A more detailed discussion is presented in [8], [9].] According to [1], the coefficients R An for the upstep and the downstep differ only by sign.…”
Section: ) Electrode Of Finite Thicknessmentioning
confidence: 99%
“…Let us compare the reflection coefficient from a single electrode found directly by FEM with the reflection coefficient R com per electrode calculated by Eq. (8). The edge frequencies are obtained with the help of computations for the infinite grating.…”
The reflection of SAW from single steps as well as single and multiple grooves, projections, and strips on halfinfinite isotropic (fused quartz) and piezoelectric (LiNbO3) substrates is investigated by FEM. A perfectly matched layer (PML) is used in order to truncate the computational domain. The amplitude of the reflected SAW is found by applying FFT to the scattered field on the surface of the substrate.
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