2004
DOI: 10.1080/00202967.2004.11871571
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Reaction Process of Two-step Catalysation Pre-treatment for Electroless Plating on Non-conducting Substrates

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Cited by 10 publications
(8 citation statements)
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“…This deposition method has several advantages including cost, uniformity of films, and covering of complicated structures. This deposition requires catalyzation pretreatment of substrates generally using tin and palladium (1)(2)(3). For silicon (Si) substrates, obtaining adhesive metal films with conventional catalyzation pretreatments is difficult.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…This deposition method has several advantages including cost, uniformity of films, and covering of complicated structures. This deposition requires catalyzation pretreatment of substrates generally using tin and palladium (1)(2)(3). For silicon (Si) substrates, obtaining adhesive metal films with conventional catalyzation pretreatments is difficult.…”
Section: Introductionmentioning
confidence: 99%
“…[1] and [2] (8); 2) Si nanopore formation by metal-particle-enhanced hydrofluoric acid (HF) etching expressed by Eqs. [2] and [3] (9,10); and 3) metal filling in nanopores and metal-film formation on the whole Si surface by autocatalytic electroless deposition: Electroless deposition of metal on Si:…”
Section: Introductionmentioning
confidence: 99%
“…Sn 4+ ions precipitate as tin(IV) hydrates. 28) These indicate that the oxidation of Sn 2+ ions decreases the total amount of Sn ions or depletes Sn ions in the deposition bath. To inhibit the oxidation of Sn 2+ ions during sample preparation, we used malonic acid as a sacrificial reagent.…”
mentioning
confidence: 97%
“…Autocatalytic electroless deposition, which is the conventional method to metalize nonmetallic substrates [13,14], has several advantages including cost, uniformity of films, and covering of complicated structures. This deposition requires catalyzation pretreatment of substrates [13][14][15]. For Si substrates, obtaining adhesive metal films with conventional pretreatments is difficult.…”
mentioning
confidence: 99%