“…In the methane-rich mixture ( Figure 1) the primary ions of methane are .sufficiently intense that a net formation of SiH2 by reactions (3), (9),·(15) and (22) occurs with increasing pressure until·sufficient depletion of methane primary ion intensity has taken place for the loss processes, namely reactions (31), (32) A similar argument applies to the maximum in Si (m/e 28), + shown in Figure 1, as Si is produced in the methane-rich mixtures by reactions (1), (7), and (13) and react by (27), (28) Similarly.the absence of C2H (m/e 27) formation in the monosilane-rich system was attributed earlier to competitive reaction precursor ion CH2 with monosilane, and it is now clear from Table I.that· the pertinent reactions are (13) amounts by reactions (1)-(4), (7)- (10), (13)- (16), (19), (22), (23), (26), and (34). In the monosilane-rich mixture only SiH (m/e 31), a precursors to Si2Hs , shows a net increase ( Figure 6) and this is 5,13,14 due to reactions characteristic of pure monosilane.…”