Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

Dong, Xiang; Su, Yuanjie; Wu, Zhiming; Xu, Xiangdong; Xiang, Zihao; Chen, Wenyu; Dai, Jinhong; Huang, Zhiyuan; Wang, Tao; Jiang, Yadong

doi:10.1016/j.apsusc.2021.150138

Cited by 10 publications

(13 citation statements)

References 60 publications

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“…7c. This results in the decreasing of deposition rate as rising of pulsed frequency which is consistent to the conclusion in literature 10,11 .…”

Section: Pulsed Frequencysupporting

confidence: 92%

“…Furthermore, more argon ion flux is seen in DCM case. As a result of that, the deposition rate using DCM will be bigger than that using P-DCM which is also found in the experimental work of Glocker 4 and Dong 11 . Besides, the argon ion…”

Section: Pulsed Frequencysupporting

confidence: 67%

“…Glocker 4 compared direct current (DC) magnetron and 35 kHz alternating current (AC) magnetron at the same power and reported electron energies, ion densities and deposition rates of 3.2 eV, 6.4 × 10 16 m -3 , 0.70 nm/s for AC, and 2.4 eV, 1.63 × 10 16 m -3 , 0.82 nm/s for DC, respectively. Lee et al 10 reported decreasing deposition rate at pulse frequencies less than 20 kHz, supported by similar results for vanadium oxide sputtering at frequencies up to 350 kHz 11 . Deposition rates were generally found to increase with duty cycles 12,13 .…”

Section: Introductionmentioning

confidence: 56%

“…The effect of pulsed frequency on deposition rate, time-averaged electron density (𝑛 ̅ 𝑒 ) and time-averaged electron temperature (𝑇 ̅ 𝑒 ) near the substrate are experimentally studied by several researchers 4,[8][9][10][11] .…”

Section: Pulsed Frequencymentioning

confidence: 99%

See 3 more Smart Citations

A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge

Tran

Leong

Hariharaputran

et al. 2023

Preprint

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We simulated a pulsed direct current (DC) planar magnetron discharge using fluid model, solving for species continuity, momentum, and energy transfer equations, coupled with Poisson equation and Lorentz force for electromagnetism. Based on a validated DC magnetron model, an asymmetric bipolar potential waveform is applied at the cathode at 50–200 kHz frequency and 50–80% duty cycle. Our results show that pulsing leads to increased electron density and electron temperature, but decreased deposition rate over non-pulsed DC magnetron, trends consistent with those reported by experimental studies. Increasing pulse frequency increases electron temperature but reduces the electron density and deposition rate, whereas increasing duty cycle decreases both electron temperature and density but increases deposition rate. We found that the time-averaged electron density scales inversely with the frequency, and time-averaged discharge voltage magnitude scales with the duty cycle. Our results are readily applicable to modulated pulse power magnetron sputtering and can be extended to alternating current (AC) reactive sputtering processes.

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“…7c. This results in the decreasing of deposition rate as rising of pulsed frequency which is consistent to the conclusion in literature 10,11 .…”

Section: Pulsed Frequencysupporting

confidence: 92%

Section: Pulsed Frequencysupporting

confidence: 67%

Section: Introductionmentioning

confidence: 56%

Section: Pulsed Frequencymentioning

confidence: 99%

See 2 more Smart Citations

A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge

Tran

Leong

Hariharaputran

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

“…The methods include techniques such as micro-arc oxidation (MAO), magnetron sputtering deposition, electrophoretic deposition, anodic oxidation, electrolytic polishing, galvanizing process, screen printing, powder coating, water transfer printing, electrophoresis, etc. [15][16][17][18][19][20][21][22][23][24]. Among these methods, MAO is of great interest because of the advantages of a simple process, no pollution, no need for vacuum or low-temperature conditions, etc.…”

Section: Introductionmentioning

confidence: 99%

Surface Treatment of Zn-Mn-Mg Alloys by Micro-Arc Oxidation in Silicate-Based Solutions with Different NaF Concentrations

Sun

et al. 2021

Materials

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Newly developed Zn-Mn-Mg alloys can be invoked as biomedical materials because of their excellent mechanical properties. However, the corrosion behavior of Zn-Mn-Mg alloys was still lacking in research. It had grown to be a hot research topic to improve the corrosion behavior of Zn alloys by surface treatment to meet the application of degradable Zn alloys in biomedical applications. Micro arc oxidation (MAO) is a simple and effective method to improve the corrosion behavior of the alloy. MAO coatings were successfully prepared on the surface of Zn-Mn-Mg alloys by MAO in silicate-based solutions with different NaF concentrations. The microstructure and phase composition of MAO coatings prepared on Zn-Mn-Mg alloys with different NaF concentrations in the electrolyte was examined by a scanning electron microscope and X-ray diffraction. The results showed that the MAO coatings are porous and mainly composed of ZnO. With the increasing NaF concentration in the electrolyte, the average thickness increases. The distribution of the micro/nanopores was uniform, and the pore size ranged from the submicron scale to several micrometers after MAO treatment in the electrolyte containing different concentrations of NaF. Potential dynamic polarization curves and electrochemical impedance spectroscopy were employed to assess the corrosion behavior of MAO coatings in Hank’s solution. The highest corrosion rate can be achieved after MAO treatment, with an electrolyte concentration of 1.5 g/L NaF in Hank’s solution. These results indicated that MAO coating can accelerate the corrosion resistance of a Zn-Mn-Mg alloy.

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In Situ Raman Observation of Dynamically Structural Transformation Induced by Electrochemical Lithium Intercalation and Deintercalation from Multi‐Electrochromic V₂O₅ Thin Films

Zhang

Xie

et al. 2022

Adv Materials Inter

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Understanding the dynamic nature of electrochemical interface induced by ion transfer is of great significance. Herein, in situ Raman spectroscopy combined with electrochemistry has been developed to real‐time monitor the transfer of lithium ions at electrode‐electrolyte interface and reveal the associated structure and performance variation of the vanadium pentoxide (V2O5) thin films on the indium tin oxide/silver/aluminum zinc oxide/poly(ethylene terephthalate) (ITO/Ag/AZO/PET) substrates. It is demonstrated that the Raman active/silent states of the vibrational modes of VO, V3O, and VO bonds, as well as the transformation of the V2O5 thin films from V2O5 to lithium vanadate (LixV2O5), can be reversibly changed with reversible extraction/insertion of lithium ions. In situ UV‐vis spectroscopy in combination with in situ Raman analysis is applied to show that the reversible evolutions involving V2O5/LixV2O5 and VO bonding characteristic contribute to the multi‐color electrochromic characteristic of the V2O5 thin films enabling a superior optical modulation of up to 75.41%. This experimental approach establishes a significative guideline for the more elaborate research on the dynamic nature of electrochemical interface.

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Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

Cited by 10 publications

References 60 publications

A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge

A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge

Surface Treatment of Zn-Mn-Mg Alloys by Micro-Arc Oxidation in Silicate-Based Solutions with Different NaF Concentrations

In Situ Raman Observation of Dynamically Structural Transformation Induced by Electrochemical Lithium Intercalation and Deintercalation from Multi‐Electrochromic V₂O₅ Thin Films

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Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

Cited by 10 publications

References 60 publications

A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge

A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge

Surface Treatment of Zn-Mn-Mg Alloys by Micro-Arc Oxidation in Silicate-Based Solutions with Different NaF Concentrations

In Situ Raman Observation of Dynamically Structural Transformation Induced by Electrochemical Lithium Intercalation and Deintercalation from Multi‐Electrochromic V2O5 Thin Films

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In Situ Raman Observation of Dynamically Structural Transformation Induced by Electrochemical Lithium Intercalation and Deintercalation from Multi‐Electrochromic V₂O₅ Thin Films