2020
DOI: 10.3390/coatings10070647
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Reactive Sputtering Deposition of Epitaxial TiC Film on Si (100) Substrate

Abstract: Epitaxial (100) TiC film deposition on Si (100) substrate by direct current magnetron reactive sputtering of a metallic Ti target with 3%–6% CH4 in Ar gas was investigated. X-ray diffraction and cross-sectional scanning transmission electron microscopy (STEM) reveal that epitaxial cubic TiC can be grown on the Si substrate by domain matching epitaxy in 5/4 ratio with the epitaxial relationship of TiC (100)[0 1 ¯ 1] // Si (100)[0 1 ¯ 1]. For sputtering with 3% and 4% CH4, the deposited films… Show more

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Cited by 9 publications
(2 citation statements)
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“…These peaks are located at higher binding energies than metallic Ti 2p peaks (459.8 and 453.9 eV); this higher Ti binding energy peak combined with a weak C 1s peak at 281.7 eV (Figure 1d) assigned to carbide indicates the formation of the TiC phase in the composite material. [34] Thus, from the XRD and XPS data, we confirm the successful combination of Sn particles and TiC/C-CNTs matrix to form the composite during the high-energy milling process. Scanning electron microscopy (SEM) image in Figure S5a (Supporting Information) revealed that the Sn particles (commercial) have a micron-sized spherical morphology with a multi-size distribution (1 to 5 μm).…”
Section: Resultssupporting
confidence: 60%
“…These peaks are located at higher binding energies than metallic Ti 2p peaks (459.8 and 453.9 eV); this higher Ti binding energy peak combined with a weak C 1s peak at 281.7 eV (Figure 1d) assigned to carbide indicates the formation of the TiC phase in the composite material. [34] Thus, from the XRD and XPS data, we confirm the successful combination of Sn particles and TiC/C-CNTs matrix to form the composite during the high-energy milling process. Scanning electron microscopy (SEM) image in Figure S5a (Supporting Information) revealed that the Sn particles (commercial) have a micron-sized spherical morphology with a multi-size distribution (1 to 5 μm).…”
Section: Resultssupporting
confidence: 60%
“…To this end, transition metal carbides (TMCs), particularly titanium carbide (TiC) in various forms, such as two-dimensional (2D) layer (MXene), nanoparticles, , thin films, and nanofibers, , have shown exceptional electrochemical properties. These properties have found application across a diverse spectrum, spanning from energy storage to bioelectronics devices. , Among those forms, only Ti 3 C 2 MXene has been recently suggested as a neural electrode material due to its remarkably high areal capacitance (100–300 mF/cm 2 ), , outstanding electrical conductivity (∼10 000 S/cm) 2 , very low impedance, and good in vivo neural recording performance .…”
Section: Introductionmentioning
confidence: 99%