Real three dimensional micro fabrication using stereo lithography and metal molding

Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

“…Here, the pore diameter was adjusted to φ ~ 1 μm to prevent the cells (φ ~ 5 μm) from entering the microchannel, and the thickness was adjusted to 5 μm. The master mold was made by microstereolithography developed in our laboratory (Ikuta & Hirowatari, 1993). The surface of the mold was coated with a fluorocarbon polymer for easy removal of the mold.…”

Design and Fabrication of Micro Fluid Power System by Stereolithography

“…Prof. Ikuta has pointed out that an optical prototyping has advantage of production for micromachining [6]. Conventional micromachining has made only a two dimensional structure.…”

Biochemical IC Chips Fabricated by Hybrid Microstereolithography

“…We proposed and developed the world's first microstereolithography named "IH Process (Integrated Harden Polymer Stereo-Lithography)" [1]. The fabrication principle of the IH process is based on the stereolithography which is used to make 3D mock-up model in macro size.…”

“…On the other hand, we have developed several types of microstereolithography to make truly 3D microstructures. The world's first microstereolithography system called "Ill process" was proposed and developed by Ikuta and Hirowatari in 1993 [1]. The IH process made possible the layer-by-layer process of 5 gtm thickness with modifications to both the optical system and the characteristics of photopolymer.…”

“…Conventional microstereolithography systems developed by us and other groups are based fixed surface methods [1,6] and free surface methods [2][3][4][5]7]. Since these techniques used a layer-by-layer process, the depth resolution and yield rate are limited due to the surface tension and viscosity of piling photopolymer layer.…”