K o j i I k u t a K e n H i r o w a t a r i T s u k a s a O g a t aABSTRACT New type of real three dimensional micro fabrication using micro stereo lithography and electro plating named "IH Process" has been proposed and demonstrated by the authors in MEMS'93. This process is applicable for both polymer and metal micro structure. In the first part of this paper, new
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