“…Nevertheless, most of the research on silicon nitride has been concentrated on infrared (IR) [13,14,15,16,17,18] or near infrared (NIR) [19,4] applications. The few reported works on Si 3 N 4 photonic crystals [20,21,22,23,24,25] and microring resonators [26] in the visible range were of considerably lower fabrication quality compared with their Si counterparts.…”