Realization of hybrid microfluidic systems using standard LTCC process

Abstract

The paper reports some results of a cooperation research in which the possibility to realize microfluidic components and modules by using low temperature cofiring ceramic multilayer (LTCC-ML) technology is examined. The main goal is the development of LTCC multilayer which are carrier for microfluidic Silicon components and combine electrical and fluidic fimctions. Also fluidic mixer elements and hybrid microvalves were developed. These different components are combined during the examinations to realize a microscope chamber. This is a fluidic microsystem to inspect and treatment smallest samples for life science applications. It can be used in high resolution microscopes. The microscope chamber consists of a LTCC manifold which contains fluidic channels and forms the carrier for assembled microfluidic and electric silicon components.

Novel Microsystem Applications with New Techniques in Low‐Temperature Co‐Fired Ceramics

“…There are several examples in the literature where a hybrid approach has been used to integrate microsystems in LTCC, 1 as with valves and windows in a microfluidic LTCC board, 23 and silicon or ceramic membranes in an LTCC valve 24 . Partially sintered membranes and bodies were joined with a glass frit for an all‐ceramic pressure transducer 25 .…”

On the reliability of thermopneumatic actuators with silicon membranes

“…Microvalves, micropumps, and integrated flow distribution and control systems (for either gases or liquids) have been researched, developed and deployed commercially. Most of these devices or systems have employed silicon as the main mechanical material, because of its attractive mechanical properties, especially in terms of yield strength [17], although other structural materials have been employed [7,9,10,12,16]. On the other hand, silicon is brittle, so that stress in excess of the yield strength leads to a rapidly increased probability of fracture.…”

“…Thermopneumatic actuators have been applied to a relatively wide variety of applications using microfabrication techniques [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. Microvalves, micropumps, and integrated flow distribution and control systems (for either gases or liquids) have been researched, developed and deployed commercially.…”

LTCC Microfluidic System

“…They contain electronics, cooling or heating systems, sensors and actuators, and microsystems 1,2,9–13 . Microfluidic applications of LTCC devices are particularly interesting 14–18 . Sophisticated micro‐electromechanical systems and micro‐opto electromechanical systems packages made using LTCC technology integrate electronic measurement, control, and signal conditioning circuits.…”

“…1,2,[9][10][11][12][13] Microfluidic applications of LTCC devices are particularly interesting. [14][15][16][17][18] Sophisticated micro-electromechanical systems and micro-opto electromechanical systems packages made using LTCC technology integrate electronic measurement, control, and signal conditioning circuits. Moreover, electrical, optical, gas, and fluidic network systems are realized in one package.…”