“…In fields such as electronic-equipment manufacturing, biotechnology, and medicine, miniaturization and large-scale integration of systems are advancing, and process technology is being used to upgrade the functions of materials, substrates, and microdevices [ 1 , 2 , 3 , 4 , 5 , 6 ]. This development includes the demand for various structures with complex shapes, such as three-dimensional structures for realizing effective microregional chemical reactions, mixing, and analyses in various fields, including biological microelectromechanical systems (bioMEMSs) and micro total analysis systems (µTASs) [ 7 , 8 , 9 , 10 , 11 ].…”