2010
DOI: 10.1063/1.3475987
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Realizing the frequency quality factor product limit in silicon via compact phononic crystal resonators

Abstract: High-Q ͑quality factor͒ resonators are a versatile class of components for radio frequency micro-electromechanical systems. Phononic crystals provide a promising method of producing these resonators. In this article, we present a theoretical study of the Q factor of a cavity resonator in a two-dimensional phononic crystal comprised of tungsten rods in a silicon matrix. One can optimize the Q of a phononic crystal resonator by varying the number of inclusions or the cavity harmonic number. We conclude that usin… Show more

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Cited by 28 publications
(20 citation statements)
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“…8). It is particularly interesting that the hybrid model agrees well with the experimental data when the TMFP is large enough to cover 3-5 lattice periods, as this is similar to the literature-accepted bounds 10,[33][34][35][36][37][38][39] for the fewest and largest number of periods needed to observe PnC behaviour.…”
Section: Resultssupporting
confidence: 80%
“…8). It is particularly interesting that the hybrid model agrees well with the experimental data when the TMFP is large enough to cover 3-5 lattice periods, as this is similar to the literature-accepted bounds 10,[33][34][35][36][37][38][39] for the fewest and largest number of periods needed to observe PnC behaviour.…”
Section: Resultssupporting
confidence: 80%
“…Therefore, phononic crystals provide the means to control acoustic-wave energy flows, e.g., the confinement of acoustic waves using defects introduced in the crystals. [12][13][14] Compared with photonic crystals that have submicron periodicity, phononic crystals are mainly studied within the range of millimeters. Recently, phononic crystals have shown full phononic band gaps up to the gigahertz range by reducing their periodic spacing to the submicron scale.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, while Q values larger than 10 5 (dashed lines) would yield the highest flop rates, they would unfortunately require fabrication tolerances that cannot be obtained using state-of-the-art fabrication techniques, and at the frequencies of interest (few GHz) the excitations would exceed the maximum f·Q limit of Si. 8 However, Q values around 10 4 (circles) are reliably obtainable and offer Rabi oscillation performance that rivals or exceeds the best quantum dot systems. Next, we perform an analysis on the most practical temperature range of operation.…”
Section: A Acceptor Atom Quantum Systemmentioning
confidence: 99%