“…In practice, the error term ε t,m models the variation component that is spatially uncorrelated and, hence, cannot be captured by the DCT basis functions in (1). BMF aims to accurately find the DCT coefficients {α t,m,k ; k = 1, 2, ..., K} by measuring very few dies {(x (n) , y (n) , g t,m (n) ); n = 1, 2, ..., N} from the m-th wafer, where (x (n) , y (n) ) and g t,m…”