Recent advances in expanding the spectral range of MEMS Fabry-Perot filters

Ebermann, Martin; Neumann, Norbert; Hiller, Karla; Gittler, Elvira; Meinig, Marco; Kurth, Steffen

doi:10.1117/12.843441

Cited by 18 publications

(16 citation statements)

References 5 publications

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“…Depending on the type of mirrors used, an additional reflectance phase shift ϕ(λ) occurs as described in ref. 5 . The transmittance or spectral filter characteristic of a typical FPI is displayed in fig.…”

Section: The Fabry-pérot Interferometermentioning

confidence: 95%

“…The authors of this paper have already published their work on tunable FP filters with dielectric layer stack based reflectors for the spectral ranges from 3 µm to 5 µm and 8 µm to 11 µm 5,6 , which is based on a well-proven mechanical design 6 . The major disadvantage of a design with one movable reflector carrier is its sensitivity to gravitation and vibration induced forces.…”

Section: Introductionmentioning

confidence: 99%

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Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors

Meinig¹,

Kurth²,

Hiller

et al. 2011

SPIE Proceedings

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A tunable IR filter based on a Fabry-Perot interferometer with two movable reflectors is reported. The infrared filter can be tuned over a wavelength range from 8 m to 11 m with voltages lower than 63 V. The FWHM bandwidth is lower than 200 nm and the peak transmittance is larger than 70 %. Simulation and practical shock test, both showed that the device can withstand 1500 g, 0.5 ms shocks according to Mil-Std-883G, method 2002.4, test condition B. The new infrared filter measures 8.5 mm x 8.5 mm and is suitable for the integration in a TO-8 housing in combination with a broadband infrared detector. The design benefits from relatively low stiffness of the mirror suspensions, compensation of vibration and gravitation induced forces possibly influencing the central wavelength and much lower actuation voltages as a result. Both reflector carriers are movable and are actuated by electrostatic forces

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Section: The Fabry-pérot Interferometermentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors

Meinig¹,

Kurth²,

Hiller

et al. 2011

SPIE Proceedings

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“…Much work has been put to realize a MEMS-based FPI, usually concentrating on bulk-silicon MEMS. [5], [6], [7], [8] Bulk-MEMS solutions suffer, however, from it being a mass-spring system: they are often susceptible to vibrations and gravitational effects, and have a long step response time. In addition, the chip tends to get quite large (5-10 mm a side) to keep control voltages down.…”

Section: The Mems Fabry-perot Interferometermentioning

confidence: 99%

Advanced MEMS spectral sensor for the NIR

Antila¹,

Kantojärvi²,

Mäkynen³

et al. 2015

SPIE Proceedings

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Near Infrared (NIR) spectrometers are widely used in many fields to measure material content, such as moisture, fat and protein in grains, foodstuffs and pharmaceutical powders. These fields include applications where only highly miniaturized and robust NIR sensors can be used due to small usable space, weight requirements and/or hostile working environment. Handheld devices for material inspection, online process automation and automotive industry introduce requirements for size, robustness and cost, which is currently difficult to meet. In this paper we present an advanced spectral sensor based on a tunable Microelectromechanical (MEMS) Fabry-Perot Interferometer. The sensor is fibercoupled, weighs 125 grams and fits to an envelope of 25x55x55 mm 3 . Three types of sensors cover the wavelength ranges from 1.35-1.7 µm, 1.55-2.0 µm and 1.7-2.2 µm, utilizing only a single pixel extended InGaAs detector, avoiding the expensive linear array detectors. We describe the design, principle of operation and calibration methods together with the control schemes. Some environmental tests are described and their results and finally application measurement results are presented along with discussion and conclusions.

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“…However, those cavities were characterized by relatively large mode volumes [4], due to practical tradeoffs between the mirror curvature, aperture, and spacing. Driven 2 of 18 by applications in fiber communications, MEMS-based spherical-mirror FPCs were developed in the late 1990s [8], and commercial devices reportedly achieved F > 10 3 [9,10].…”

Section: Introductionmentioning

confidence: 99%

“…Equation (10) indicates that the longitudinal modal spacing is independent of the mirror curvatures, and is the same as that for the planar mirror Fabry-Perot. The second term in Equation (10) represents a shift in all resonance frequencies, and is dependent on mirror curvatures.…”

Section: Introductionmentioning

confidence: 99%

On-chip High-finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

Bitarafan¹,

DeCorby²

2017

Preprint

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For applications in sensing and cavity-based quantum computing and metrology, openaccess Fabry-Perot cavities -with an air or vacuum gap between a pair of high reflectance mirrors -offer important advantages compared to other types of microcavities. For example, they are inherently tunable using MEMS-based actuation strategies, and they enable atomic emitters or target analytes to be located at high field regions of the optical mode. Integration of curved-mirror Fabry-Perot cavities on chips containing electronic, optoelectronic, and optomechanical elements is a topic of emerging importance. Micro-fabrication techniques can be used to create mirrors with small radius-of-curvature, which is a prerequisite for cavities to support stable, small-volume modes. We review recent progress towards chip-based implementation of such cavities, and highlight their potential to address applications in sensing and cavity quantum electrodynamics.

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Recent advances in expanding the spectral range of MEMS Fabry-Perot filters

Cited by 18 publications

References 5 publications

Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors

Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors

Advanced MEMS spectral sensor for the NIR

On-chip High-finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

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