We report the design, fabrication, and test results of a tunable pyroelectric detector with an integrated micromachined Fabry-Perot (FP) filter for gas analysis in the mid-wave infrared (MWIR). The new approach is based on a bulk micromachined Fabry-Perot interferometer with an air cavity, which is electrostatically tuned. Various types of movable reflectors and spring configurations are fabricated to determine the optimum solution with respect to maximum tuning range, low gravity influence on center wavelength, and suitable filter bandwidth. Short and long cavity filters are designed for the spectral ranges of 3 to 4.3 ?m and 3.7 to 5.0 ?m, respectively. The tunable filter is arranged on top of a current mode pyroelectric detector with a flat spectral response. It is shown that the main challenge is to achieve a high finesse in spite of nonperfect parallelism, mirror curvature, and the additional phase shift caused by the Bragg reflectors

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This paper reports design, fabrication and test results of a tunable pyroelectric detector with an integrated micromachined Fabry-Perot (FP) filter for gas analysis in the Mid-Wave Infrared (MWIR). The new approach is based on a bulk micromachined Fabry-Perot interferometer with an air cavity, which is electrostatically tuned. Various types of moveable reflectors and spring configurations have been fabricated to determine the optimum solution with respect to maximum tuning range, low gravity influence on center wavelength and suitable filter bandwidth. Short and long cavity filters were designed for the spectral ranges of 3...4.3 m and 3.7...5.0 m respectively. The tunable filter is arranged on top of a current mode pyroelectric detector with a flat spectral response. It could be shown that the main challenge is to achieve a high finesse in spite of non-perfect parallelism, mirror curvature and additional phase shift caused by the Bragg reflectors

A low-cost, polymer-based microfluidic platform is described that not only includes passive microfluidic parts, but also pumps based on an on-chip electrochemical gas generation by electrolysis. A hydrogel is used as electrolyte material, which allows a simple fabrication process by screen printing or stencil printing. Test structures were designed and fabricated to illustrate the feasibility of the approach for batch processing. Microfluidic chips including reservoirs and channel structures were fabricated by microinjection molding and used to demonstrate the movement of liquids inside microchannels by the proposed micropumps. The channel system was furthermore functionalized by a plasma surface treatment to form hydrophobic and hydrophilic areas. For sealing of the channel system, as well as for bonding the microfluidic part to glass-like sensor parts, laser-cut adhesive tapes were applied

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