Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review

Ebermann, Martin; Neumann, Norbert; Hiller, Karla; Seifert, M.; Meinig, Marco; Kurth, Steffen

doi:10.1117/12.2209288

Cited by 65 publications

(39 citation statements)

References 15 publications

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“…Another MOEMS device is the Texas Instruments digital light projector (DLP), used as an engine for small NIR instruments, also described below. Finally, MOEMS Fabry-Pérot scanning filters [190][191][192] are increasingly becoming used in miniature spectrometers, especially in the NIR. There is a recent (2014) detailed review of these and other MEMS and MOEMS devices in NIR spectrometers.…”

Section: Micro-electro-mechanical Systems-based Spectrometersmentioning

confidence: 99%

Portable Spectroscopy

Crocombe¹

2018

Appl Spectrosc

402

233

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Until very recently, handheld spectrometers were the domain of major analytical and security instrument companies, with turnkey analyzers using spectroscopic techniques from X-ray fluorescence (XRF) for elemental analysis (metals), to Raman, mid-infrared, and near-infrared (NIR) for molecular analysis (mostly organics). However, the past few years have seen rapid changes in this landscape with the introduction of handheld laser-induced breakdown spectroscopy (LIBS), smartphone spectroscopy focusing on medical diagnostics for low-resource areas, commercial engines that a variety of companies can build up into products, hyphenated or dual technology instruments, low-cost visible-shortwave NIR instruments selling directly to the public, and, most recently, portable hyperspectral imaging instruments. Successful handheld instruments are designed to give answers to non-scientist operators; therefore, their developers have put extensive resources into reliable identification algorithms, spectroscopic libraries or databases, and qualitative and quantitative calibrations. As spectroscopic instruments become smaller and lower cost, ''engines'' have emerged, leading to the possibility of being incorporated in consumer devices and smart appliances, part of the Internet of Things (IOT). This review outlines the technologies used in portable spectroscopy, discusses their applications, both qualitative and quantitative, and how instrument developers and vendors have approached giving actionable answers to non-scientists. It outlines concerns on crowdsourced data, especially for heterogeneous samples, and finally looks towards the future in areas like IOT, emerging technologies for instruments, and portable hyphenated and hyperspectral instruments.

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Section: Micro-electro-mechanical Systems-based Spectrometersmentioning

confidence: 99%

Portable Spectroscopy

Crocombe¹

2018

Appl Spectrosc

402

233

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“…These requirements impede their miniaturization for applications where it is critical to minimize size, cost and power consumption. Recent years have seen the development of scaled-down spectrometer systems for a wide range of handheld, portable and integrated applications, including in soil and crop analysis, monitoring of food industry production lines and marine/underwater scientific research (2)(3)(4)(5)(6). It is clear to see that in these uses, it is often far preferable to attain indicative, instantaneous and on-the-spot results, instead of transporting samples to a laboratory for ultra-high resolution analysis (5,7).…”

Section: Main Textmentioning

confidence: 99%

“…LCTFs suffer from a similar constraint, containing a stack of polarizers and liquid crystal cells which are challenging to miniaturize. On the other hand, tunable Fabry-Pérot filters can be fabricated by well-established MEMS compatible processes (36), which make them highly suitable for microspectrometer mass production (4,34).…”

Section: Tunable Filter-based Microspectrometersmentioning

confidence: 99%

Miniaturization of optical spectrometers

Yang

Albrow-Owen

Cai

et al. 2021

Science

501

263

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Spectroscopic analysis is one of the most widely used analytical tools in scientific research and industry. Although laboratory benchtop spectrometer systems offer superlative resolution and spectral range, their miniaturization is crucial for applications where portability is paramount or where in situ measurements must be made. Advancement in this field over the past three decades is now yielding microspectrometers with performance and footprint near those viable for lab-on-a-chip systems, smartphones, and other consumer technologies. We summarize the technologies that have emerged toward achieving these aims—including miniaturized dispersive optics, narrowband filter systems, Fourier transform interferometers, and reconstructive microspectrometers—and discuss the challenges associated with improving spectral resolution while device dimensions shrink ever further.

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“…Dynamically tunable narrowband mid-infrared (3

m to 5

m) filters are key devices in a diverse range of applications, including chemical spectroscopy, thermography, multispectral/hyperspectral imaging [ 1 , 2 , 3 ]. It has been accepted that conventional tunable narrowband mid-infrared filters realized by using diffraction gratings, motorized filter wheels, acousto-optic interactions [ 4 , 5 ], or Fabry-Pérot interferometers based on micro-electro-mechanical systems [ 6 ] or liquid-crystals [ 7 ] suffer from different limitations, as summarized by Julian et al [ 8 ]. For example, diffraction gratings and motorized filter wheels have moving parts and slow tuning speed, acousto-optic tunable filters are complex to manufacture and integrate, and Fabry-Pérot interferometer-based filters have limited spectral tunability.…”

Section: Introductionmentioning

confidence: 99%

Nonvolatile, Reconfigurable and Narrowband Mid-Infrared Filter Based on Surface Lattice Resonance in Phase-Change Ge2Sb2Te5

et al. 2020

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We propose a nonvolatile, reconfigurable, and narrowband mid-infrared bandpass filter based on surface lattice resonance in phase-change material Ge2Sb2Te5. The proposed filter is composed of a two-dimensional gold nanorod array embedded in a thick Ge2Sb2Te5 film. Results show that when Ge2Sb2Te5 transits from the amorphous state to the crystalline state, the narrowband reflection spectrum of the proposed filter is tuned from 3.197 μm to 4.795 μm, covering the majority of the mid-infrared regime, the peak reflectance decreases from 72.6% to 25.8%, and the corresponding quality factor decreases from 19.6 to 10.3. We show that the spectral tuning range can be adjusted by varying the incidence angle or the lattice period. By properly designing the gold nanorod sizes, we also show that the quality factor can be greatly increased to 70 at the cost of relatively smaller peak reflection efficiencies, and that the peak reflection efficiency can be further increased to 80% at the cost of relatively smaller quality factors. We expect that this work will advance the engineering of Ge2Sb2Te5-based nonvalatile tunable surface lattice resonances and will promote their applications especially in reconfigurable narrowband filters.

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Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review

Cited by 65 publications

References 15 publications

Portable Spectroscopy

Portable Spectroscopy

Miniaturization of optical spectrometers

Nonvolatile, Reconfigurable and Narrowband Mid-Infrared Filter Based on Surface Lattice Resonance in Phase-Change Ge2Sb2Te5

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