Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Li, Ping; Chen, Siyu; Dai, Houfu; Yang, Zi; Chen, Zhiquan; Wang, Yasi; Chen, Yiqin; Peng, Wenqiang; Shan, Wenqian; Duan, Huigao

doi:10.1039/d0nr07539f

Cited by 189 publications

(110 citation statements)

References 284 publications

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“…Conventional photolithography is unable to get the required nanoscale features. Some of the suitable techniques to overcome its limitations would be electron-beam lithography [ 27 ], dip-pen lithography [ 28 ], and focused-ion lithography [ 29 ]. However, these are not always available, as well as being expensive and time-consuming.…”

Section: Introductionmentioning

confidence: 99%

Self-Assembled Metal Nanohole Arrays with Tunable Plasmonic Properties for SERS Single-Molecule Detection

et al. 2022

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Arrays of metal nano-holes have proved to be among of the most promising structures for applications in the field of nano-photonics and optoelectronics. Supporting both localized and propagating surface plasmons resonances, they are characterized by very high versatility thanks to the tunability of these modes, by means of the change of their periodicity, the size of the holes and metal composition. The interaction between different optical features can be exploited to modulate electromagnetic field distribution leading various hot-spots excitations on the metal surfaces. In this work, long range ordered arrays of nano-holes in thin gold films, with different geometrical characteristics, were fabricated by a modified nano-sphere lithography protocol, which allows precise control on holes’ dimensions together with the preservation of the order and of the pristine periodicity of the array. An in-depth analysis of the correlation between surface plasmon modes interference and its effect on electromagnetic field distribution is proposed, both by numerical simulations and experimentally. Finally, metal nano-holes arrays are exploited for surface enhanced Raman experiments, evaluating and comparing their performances by the estimation of the enhancement factor. Values close to the single molecule detection are obtained for most of the samples, proving their potentialities in surface enhanced spectroscopy applications.

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Section: Introductionmentioning

confidence: 99%

Self-Assembled Metal Nanohole Arrays with Tunable Plasmonic Properties for SERS Single-Molecule Detection

et al. 2022

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“…Different from the random and irregular etching conducted by common defect engineering methods, accurately controlled etching can be implemented via FIB. [ 35,36 ] The highly focused and directional Ga + ion beam makes it possible to expose designed quantitative edge lengths. Meanwhile, other areas in the basal plane would not be affected, thus maintaining its pristine properties.…”

Section: Introductionmentioning

confidence: 99%

Pt Edge‐Doped MoS₂: Activating the Active Sites for Maximized Hydrogen Evolution Reaction Performance

Pei

Qiao

Chen

et al. 2021

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The demand of clean energy calls for efficient and low‐cost hydrogen evolution reaction electrocatalysts. Fabricating hybrid catalysts from noble/non‐noble catalysts is a practical route to reducing the consumption of noble metals and enhancing catalytic efficiency. Here, 2H‐MoS2 is etched and edge‐doped with Pt nanoparticles using focused ion beam and photoreduction techniques. Precise comparison of as‐prepared samples demonstrates that the enhancement of catalytic performance can be controlled through tuning the catalyst defect length. On this basis, remarkably high performance is obtained by designing a specific defect array that is superior to commercial Pt/C with less Pt loading and higher mass activity. It has been proved by experimentation and COMSOL Multiphysics simulations that the promotion of catalytic activity not only benefits from the synergistic effect of Pt and edge active sites, but also contributes to the increased potential at the edges of the designed defect. This study sheds light on the mechanism of understanding nanoscale edge‐doped hybrid catalysts and provides a feasible strategy for the full utilization of noble metals.

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“…Ion beam induced deposition (IBID) can prepare delicate and high aspect ratio three-dimensional nanostructures with excellent mechanical strengths [ 15 ]. Advances in FIB deposition has allowed the production of nanostructures and devices with a broad range of applications including micro/nano electromechanical systems [ 16 ]. However, the purity of the deposited material is not absolute as carbons species are always retained in the deposited film.…”

Section: Introductionmentioning

confidence: 99%

“…However, the purity of the deposited material is not absolute as carbons species are always retained in the deposited film. For FIB structures, such as nanoconductors, there is a requirement to monitor and remove contamination, improving the conductivity of the deposited metal [ 16 ]. Similarly, organic contaminants deposited during FIB fabrication have also been shown to lower the Young’s modulus of three-dimensional microstructures [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM

2021

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It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon present but also on its bonding state. Despite this, the presence of carbon and its bonding state is not regularly monitored in FIB-SEMs. Here we demonstrated that Secondary Electron Hyperspectral Imaging (SEHI) can be implemented in different FIB-SEMs (ThermoFisher Helios G4-CXe PFIB and Helios Nanolab G3 UC) and used to observe carbon built up/removal and bonding changes resulting from electron/ion beam exposure. As well as the ability to monitor, this study also showed the capability of Plasma FIB Xe exposure to remove carbon contamination from the surface of a Ti6246 alloy without the requirement of chemical surface treatments.

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Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Abstract: The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing.

Cited by 189 publications

References 284 publications

Self-Assembled Metal Nanohole Arrays with Tunable Plasmonic Properties for SERS Single-Molecule Detection

Self-Assembled Metal Nanohole Arrays with Tunable Plasmonic Properties for SERS Single-Molecule Detection

Pt Edge‐Doped MoS₂: Activating the Active Sites for Maximized Hydrogen Evolution Reaction Performance

Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM

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Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Abstract: The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing.

Cited by 189 publications

References 284 publications

Self-Assembled Metal Nanohole Arrays with Tunable Plasmonic Properties for SERS Single-Molecule Detection

Self-Assembled Metal Nanohole Arrays with Tunable Plasmonic Properties for SERS Single-Molecule Detection

Pt Edge‐Doped MoS2: Activating the Active Sites for Maximized Hydrogen Evolution Reaction Performance

Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM

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Product

Resources

About

Pt Edge‐Doped MoS₂: Activating the Active Sites for Maximized Hydrogen Evolution Reaction Performance