Recent Advances in Graphene-Based Humidity Sensors With the Focus on Structural Design: A Review

Ma, Hongliang; Ding, Jie; Zhang, Zhe; Gao, Qiang; Liu, Quan; Wang, Gaohan; Zhang, Wendong; Fan, Xuge

doi:10.1109/jsen.2024.3398003

IEEE Sensors J.

2024

DOI: 10.1109/jsen.2024.3398003

|View full text |Cite

Recent Advances in Graphene-Based Humidity Sensors With the Focus on Structural Design: A Review

Hongliang Ma,

Jie Ding,

Zhe Zhang

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2024

Publication Types

Select...

Article3

Relationship

Self Cite0

Independent3

Authors

Journals

Cited by 3 publications

References 275 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO₂/Si Substrate

Gao,

Ma,

et al. 2024

ACS Appl. Mater. Interfaces

View full text Add to dashboard Cite

Graphene has great potential to be used for humidity sensing due to its ultrahigh surface area and conductivity. However, the impact of different atomic layers of graphene on the SiO 2 /Si substrate on humidity sensing has not been studied yet. In this paper, we fabricated three types of humidity sensors on the SiO 2 /Si substrate based on one to three atomic layers of graphene, in which the sensing areas of graphene are 75 μm × 72 μm and 45 μm × 72 μm, respectively. We studied the impact of both the number of atomic layers of graphene and the sensing areas of graphene on the responsivity and response/recovery time of the prepared graphene-based humidity sensors. We found that the relative resistance change of the prepared devices decreased with the increase of number of atomic layers of graphene under the same change of relative humidity. Further, devices based on tri-layer graphene showed the fastest response/recovery time, while devices based on double-layer graphene showed the slowest response/recovery time. Finally, we chose devices based on double-layer graphene that have relatively good responsivity and stability for application in respiration monitoring and contact-free finger monitoring.

show abstract

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO₂/Si Substrate

Gao,

Ma,

et al. 2024

ACS Appl. Mater. Interfaces

View full text Add to dashboard Cite

show abstract

Graphene MEMS and NEMS

Fan,

He,

Ding

et al. 2024

Microsyst Nanoeng

View full text Add to dashboard Cite

Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.

show abstract

Four ribbons of double-layer graphene suspending masses for NEMS applications

Fan,

He,

Ding

et al. 2024

Microsyst Nanoeng

View full text Add to dashboard Cite

Graphene ribbons with a suspended proof mass for nanomechanical systems have been rarely studied. Here, we report three types of nanomechanical devices consisting of graphene ribbons (two ribbons, four ribbons-cross and four ribbons-parallel) with suspended Si proof masses and studied their mechanical properties. The resonance frequencies and built-in stresses of three types of devices ranged from tens of kHz to hundreds of kHz, and from 82.61 MPa to 545.73 MPa, respectively, both of which decrease with the increase of the size of proof mass. The devices with four graphene ribbons featured higher resonance frequencies and spring constants, but lower built-in stresses than two ribbon devices under otherwise identical conditions. The Young’s modulus and fracture strain of double-layer graphene were measured to be 0.34 TPa and 1.13% respectively, by using the experimental data and finite element analysis (FEA) simulations. Our studies would lay the foundation for understanding of mechanical properties of graphene ribbons with a suspended proof mass and their potential applications in nanoelectromechanical systems.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Recent Advances in Graphene-Based Humidity Sensors With the Focus on Structural Design: A Review

Cited by 3 publications

References 275 publications

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO₂/Si Substrate

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO₂/Si Substrate

Graphene MEMS and NEMS

Four ribbons of double-layer graphene suspending masses for NEMS applications

Contact Info

Product

Resources

About

Recent Advances in Graphene-Based Humidity Sensors With the Focus on Structural Design: A Review

Cited by 3 publications

References 275 publications

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO2/Si Substrate

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO2/Si Substrate

Graphene MEMS and NEMS

Four ribbons of double-layer graphene suspending masses for NEMS applications

Contact Info

Product

Resources

About

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO₂/Si Substrate

Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO₂/Si Substrate