Recent advances on MEMS based Infrared Thermopile detectors

Mbarek, Sofiane Ben; Alcheikh, Nouha; Younis, Mohammad I.

doi:10.1007/s00542-022-05306-8

Cited by 14 publications

(3 citation statements)

References 82 publications

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“…With the development of microelectromechanical systems (MEMS) technology, the thermopile sensors have the advantages of low power consumption and high-cost effectiveness [2,3]. They have been widely applicated in infrared (IR) radiation detection, gas flow monitoring, and vacuum measurement, etc [4][5][6][7]. * Authors to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

Wafer acceptance test structures for characterization of thermoelectric materials’ thermal conductivity of thermopile sensors

Fan

Fu²,

Huang³

et al. 2023

J. Micromech. Microeng.

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Thermopile sensors have a wide range of applications in consumer and industry. Thermopile is the key component of thermopile sensors, and thermal conductivity is a basic thermal parameter of thermopile. Extracting the thermal conductivity of thermoelectric materials in thermopile sensors is of great importance. In this work, wafer acceptable test (WAT) structures that fabricated along with thermopile sensors are presented. They could guarantee the measured materials are identical to those used in thermopile sensors. The test results are consistent with the reported values, and the validity of structures is verified. This method has the advantages of on-line extraction over a wide temperature range, and simultaneous extraction of thermal conductivity of connecting wire.

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Section: Introductionmentioning

confidence: 99%

Wafer acceptance test structures for characterization of thermoelectric materials’ thermal conductivity of thermopile sensors

Fan

Fu²,

Huang³

et al. 2023

J. Micromech. Microeng.

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“…However, these detectors, relying on silicon-based materials, impose strict requirements, i.e., limited operating temperature range and wavelength detection range. [10] Other more complex discrete PSDs, for example, thermopile arrays [11] and bolometer arrays, [12] can work in wider operating temperatures and spectral range, but still suffer from the complex fabrication process and low resolution.This work introduces an innovative concept for a PSD derived from the heat transfer principles, which detects the position of a single heat spot (HS) on the detection surface precisely. Isotropic heat conduction on a homogeneous substrate results in a uniform temperature gradient distribution around a HS.…”

mentioning

confidence: 99%

mentioning

confidence: 99%

Thermal Sight: A Position‐Sensitive Detector for a Pinpoint Heat Spot

Peng,

Zhao,

Venugopal

et al. 2024

Small Science

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Precise positioning is a never‐ending goal in both fundamental science and technology. Recent decades of advancements in high‐precision position detection have predominantly relied on photoelectric effects for light detection in semiconductors. Herein, a different approach is proposed: The thermoelectric‐based position‐sensitive detector (T‐PSD) concept is designed to detect single heat spots arising from various energy sources, including electromagnetic radiation, electrons, and macroscopic mechanical heat. The T‐PSD concept is initially derived mathematically from the fundamental principles of heat conduction and the Seebeck effect. Subsequently, it is proved by finite element simulation in both 1D and 2D configurations. Following this theoretical groundwork, T‐PSD prototypes are fabricated and subjected to positional detection using various stimuli such as CO2 laser beam, hot soldering tip, and electron beam. In the prototypes, structured aluminum‐doped zinc oxide thermoelectric thin films, prepared via atomic layer deposition, are outfitted with voltage probes, enabling the measurement of thermoelectric voltages as a function of position and the intensity or temperature of the heat spot. Furthermore, practical decoding strategies are introduced to infer the position from the measured signals. The T‐PSD in this article showcases considerable promise in high‐precision position detection such as (quasi‐)particle tracking and precision machinery, offering an alternative concept in PSD design.

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