Recent developments in shape memory thin film technology

Winzek, Bernhard; Schmitz, Sam; Rumpf, Holger; Sterzl, Tobias; Haßdorf, Ralf; Thienhaus, Sigurd; Feydt, Jürgen; Moske, M.; Quandt, Eckhard

doi:10.1016/j.msea.2003.09.105

Cited by 107 publications

(45 citation statements)

References 31 publications

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“…TiNi-based alloys can provide a high work output of up to 10 J/cm 3 [58]. Ishida et al successfully produced the first NiTi thin film in 1993 [8].…”

Section: Shape Memory Alloy Thin Filmsmentioning

confidence: 99%

Cavitation erosion resistance of NiTi thin films produced by Filtered Arc Deposition

Yang

Tieu

Dunne

et al. 2009

Wear

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AcknowledgementsFirst and foremost, I would like to thank my principal supervisor, Professor A. Kiet.Tieu., for providing timely and insightful advice, financial and spiritual support. My supervisor's implicit trust in my research abilities not only allowed me to freely pursue my goals, but also gave me an opportunity to learn how to manage time and allocate resources. Special thanks go to Professor Druce Dunne, for his insightful instruction and for all the generous attention and time he devoted to my research work. Tables Table 5. List of List of Figures AbstractThe objective of this work was to produce near-equiatomic NiTi thin films by filtered arc deposition system (FADS) to improve the cavitation erosion resistance of a steel base working in liquid. First, deposition conditions were optimized in order to obtain near-equiatomic NiTi films. Energy dispersive spectroscopy (EDS) was used to measure the composition of films. It was found that both the substrate bias voltage and arc current affect the compositions of as-deposited NiTi films. X-ray diffractometry (XRD) and transmission electron microscopy (TEM) were used to investigate the microstructures of Ni-rich, Ti-rich and near-equiatomic films. Their thermal behaviours were tested using differential scanning calorimetry (DSC). Atomic force microscopy (AFM), ultra micro-indentation system (UMIS) and Romulus scratch testing were used to measure the roughness, hardness and adhesive force of a near-equiatomic thin film.The cavitation erosion resistance of the near-equiatomic NiTi film was assessed using ASTM Test Method G32. It was found that NiTi thin films showed significantly higher cavitation erosion resistance than 316 austenitic stainless steel. The improved cavitation erosion resistance was attributed to the recoverable deformation associated with pseudoelasticity of the NiTi thin film.The effect of substrate temperature on the properties of NiTi thin films was investigated by preheating substrates to different temperatures (130 C, 300 C, 430 C and 600 C). temperature of 600 C was more resistant to cavitation erosion than films deposited at other bias voltages with a similar substrate temperature.The effect of substrate material on the properties of NiTi thin films was investigated by comparing films on mild steel and on austenitic stainless steel. For similar deposition conditions, the NiTi film deposited on mild steel consisted of B2, B19' and R phases, while the NiTi film on stainless steel was dominated by B2 parent phase. This is probably because the lower thermal conductivity of austenitic stainless steel resulted in a higher deposition temperature.The dominance of the B2 phase for deposition with a high substrate temperature, a high bias voltage and the use of stainless steel substrate was not found to be due to Ni-enrichment of the films, but is consistent with stabilization of the parent phase by possible pick-up oxygen and nitrogen from the chamber atmosphere when the deposition temperature is high.The research program successfully pro...

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“…TiNi-based alloys can provide a high work output of up to 10 J/cm 3 [58]. Ishida et al successfully produced the first NiTi thin film in 1993 [8].…”

Section: Shape Memory Alloy Thin Filmsmentioning

confidence: 99%

Cavitation erosion resistance of NiTi thin films produced by Filtered Arc Deposition

Yang

Tieu

Dunne

et al. 2009

Wear

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“…It must be emphasized that our approach essentially differs from those reported so far in the literature (see for review Refs. [3][4][5][6]). Studies of shape memory thin films deposited onto various substrates have revealed that they frequently exhibit a two-way shape memory behavior [7][8][9][10][11][12][13].…”

Section: Pacs Numbersmentioning

confidence: 99%

Imprinting Bias Stress in Functional Composites

Khovaylo

Lebedev

Zakharov

et al. 2010

Jpn. J. Appl. Phys.

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We propose a simple yet effective method which allows one to attain large reversible shape changes in shape memory bimetallic composites without training procedure. It is based on the conservation of strongly anisotropic martensite microstructure artificially created in the shape memory layer. This procedure results in appearance of stress field when the shape memory layer is transformed to the austenitic state which brings about two-way shape memory effect. Utilization of this method for preparation of TiNi-based composite with a thickness of 60 µm allowed us to achieve 0.9% reversible bending deformation. It is also suggested that the implementation of this method during preparation of piezoelectric or magnetostrictive composites permits to imprint bias stress and thus to improve their characteristics without use of an external load.

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“…Their scalability, high work/weight ratio and large stroke, among other properties, account for their suitability for many actuation tasks [1]. There are, however, challenges regarding their integration in MEMS and the lack of broad experience with this actuation principle.…”

Section: Introductionmentioning

confidence: 99%

Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

Garcés-Schröder

Hecht

Vierheller

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:In-plane shape memory alloy (SMA) actuators operated in agonist-antagonist mode are integrated on silicon micro-grippers. The actuator elements are cut out of sheet material in a femtosecond laser ablation process. The assembly process is carried out on wafer-level, and the fixation realized by galvanic riveting. The initial deformation of the differential actuators needed to access their actuation potential is implemented during the gripper connection to energy supply.

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Recent developments in shape memory thin film technology

Cited by 107 publications

References 31 publications

Cavitation erosion resistance of NiTi thin films produced by Filtered Arc Deposition

Cavitation erosion resistance of NiTi thin films produced by Filtered Arc Deposition

Imprinting Bias Stress in Functional Composites

Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

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