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The hysteresis of thin film shape memory actuators affects the frequency of actuators switching between martensite and austenite. Therefore the hysteresis properties of thin films of TiNi, Ti(Ni,Cu) and Ti(NiPd) deposited onto metallic substrates by DC-Magnetron sputtering have been investigated. The substrates have different expansion coefficients to establish biaxial tensile and compressive film stresses, respectively. The results show, that the hysteresis width is significantly affected by the stress state of the shape memory film and in principal depends on the temperature range of measurement. In contrast, the difference Af-Mf remains unchanged. In some alloys zero hysteresis width could be obtained.

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