Recent progress in integrated waveguides based on oxidized porous silicon

Influence of experimental parameters on physical properties of porous silicon and oxidized porous silicon layers

“…It can be used as a base material for passive or active optical devices such as Bragg reflectors [2,3], planar and buried waveguides [4][5][6][7], micro-cavities [8][9][10]. These optical multilayer-structures require that both the thickness and refractive index are well controlled.…”

High Sensitivity pH Sensor Based on Porous Silicon (PSi) Extended Gate Field-Effect Transistor

“…The surface modification of the silicon wafer plays a major role in the sensitivity enhancement of silicon (Si) toward several analytes, and it was successfully deployed in the development of a large variety of biosensors [ 2 , 3 , 4 , 5 , 6 ]. Furthermore, several applications of PSi were investigated, such as light emitted diodes (LED) [ 7 , 8 , 9 ], photodetectors [ 10 , 11 , 12 ], waveguides [ 13 ], and chemical sensors for detection of various chemicals [ 5 , 14 , 15 , 16 , 17 ]. Furthermore, PSi exhibits a number of properties that make it an attractive material for controlled drug delivery applications [ 18 ].…”

Grating couplers on porous silicon planar waveguides for sensing applications

“…Using simple fabrication techniques, PSi waveguides provide a convenient means of guiding light with typical losses ranging from 0.2 to 30 dB/cm, depending on the wavelength and the degree to which the waveguides are oxidized. 1,2,[6][7][8][9][10][11][12][13][14] A PSi slab waveguide can be formed by electrochemically etching a high porosity ͑low refractive in-dex͒ layer beneath a low porosity ͑high refractive index͒ PSi layer. In this way, light is trapped in the high index layer by total internal reflection at the interfaces with the low index PSi layer below and air above.…”