Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors

Abstract

Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry–Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development.

Research and Simulation on the Development of a Hydraulic Prop Support System of Powered Roof Support to Increase Work Safety

“…At the same time, the obtained results of real tests will allow for setting guidelines for the development of photonic sensors dedicated to the work performed in underground mining excavations. Sensors, apart from their small size and low weight, should be characterized by high-sensitivity and -resolution measurements as well as resistance to harsh environments [52][53][54][55]. This will allow for the precise monitoring the parameters of the powered support and monitoring the operation of the rock mass within the mining wall.…”