2017
DOI: 10.1016/j.msec.2016.01.093
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Recent progress of atomic layer deposition on polymeric materials

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Cited by 177 publications
(86 citation statements)
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“…Inorganic coating on a fiber surface is formed in the course of sequential treatment in a vapor phase by a metal organic precursor and a reactant. Cellulose is especially suitable for atomic layer deposition because of the many reactive hydroxyl groups on the fibril surface . Deposition of zinc oxide on woven cotton and paper can exemplify this method .…”
Section: Coatingmentioning
confidence: 99%
See 1 more Smart Citation
“…Inorganic coating on a fiber surface is formed in the course of sequential treatment in a vapor phase by a metal organic precursor and a reactant. Cellulose is especially suitable for atomic layer deposition because of the many reactive hydroxyl groups on the fibril surface . Deposition of zinc oxide on woven cotton and paper can exemplify this method .…”
Section: Coatingmentioning
confidence: 99%
“…The advantages of the atomic layer deposition are exact control over the coating thickness at the atomic level and moderate processing conditions—pressure and temperature that can be less than 150 °C or even decreased up to the room level for alumina, titania, and zinc oxide formed through chemical reactions . The disadvantages of this technique are having a slow, prolonged and multicycle procedure, poor variability of the chemical composition, and the inhomogeneous coating formed only on the material surface …”
Section: Coatingmentioning
confidence: 99%
“…Wilson et al also reported such diffusion behavior of TMA trapped in the near surface region of giant molecules. 24,25 The increasing amplitude of aluminum atoms, therefore, is higher than that of bismuth atoms. This gives rise to the relative decrease of bismuth composition.…”
Section: B Composition Of the Films And Analysis Of Growth Mechanismmentioning
confidence: 97%
“…By using physical vapor deposition (PVD) and CVD techniques, metals and ceramics are deposited on the surface of polymers. The lowest WVTR can achieve <0.000001 g m −2 day −1 while maintaining good light transmittance . However, the equipment used in these methods is extremely expensive; the process is time‐consuming; and the process is relatively complex.…”
Section: Large‐scale Productionmentioning
confidence: 99%