Reconstruction of sputtered copper atom densities in a hollow-cathode glow discharge lamp

Oliver, Derek R.; Finlayson, Trevor R

doi:10.1088/0022-3727/30/14/018

Cited by 3 publications

(7 citation statements)

References 23 publications

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“…In equation (10), the value of is a line shape parameter that represents the departure of the emission and absorption profiles from that expected for the idealized case of an unsplit, purely Doppler-broadened absorption line [28][29][30][31]. A value of = 0.321 has been derived empirically [31] for the copper 2 P 3/2 -2 S 1/2 transition considered in the present work.…”

Section: Comparing the Calculated Profile With Experimental Datamentioning

confidence: 98%

“…These absorption measurements were recorded in the region above a hollow cathode mounted in a sputtering cell based on a standard Pyrex hollow-cathode lamp structure as shown in figure 1. This cell was mounted on an optical rail using a standard carrier with calibrated, adjustable, transverse and vertical slides to allow absorption measurements to be made in a raster sequence above the cathode, as described in [10].…”

Section: The Instrumental or 'Smoothing' Functionmentioning

confidence: 99%

“…A description of the distribution in the region above the hollow-cathode bore can be readily obtained using AAS [10]. A reconstruction algorithm [11] was applied to these absorption data and the backprojected data set obtained from the reconstruction was used to determine a representative numerical density of sputtered atoms at the top of the cathode bore.…”

Section: Introductionmentioning

confidence: 99%

“…A reconstruction algorithm [11] was applied to these absorption data and the backprojected data set obtained from the reconstruction was used to determine a representative numerical density of sputtered atoms at the top of the cathode bore. This work seeks to provide a theoretical basis for the measurements previously reported in [10] and to describe how these measurements can be used to give a more detailed description of the processes within the bore than is presently available.…”

Section: Introductionmentioning

confidence: 99%

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Oliver

Finlayson

1998

J. Phys. D: Appl. Phys.

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The distribution profile of sputtered atoms in the region above a hollow-cathode bore is calculated using a mathematical model and the results are compared with data obtained from atomic absorption spectroscopy studies of the same sputtered metal atom distribution. The smoothing of the distribution function calculated from the model using an experimentally derived instrumental function is detailed. The correlation between the calculated distribution profile and two reconstructed data sets is presented and this is related to experimental studies of the distribution profile. Details of the voltage-current characteristics of the sputtering cells for a number of different hollow-cathode bore geometries are also presented. These and the observed variation in sputtering damage along the length of the various hollow-cathode bores are shown to be related to the discharge properties exhibited by the sputtering cells used in these investigations.

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Section: Comparing the Calculated Profile With Experimental Datamentioning

confidence: 98%

Section: The Instrumental or 'Smoothing' Functionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Oliver

Finlayson

1998

J. Phys. D: Appl. Phys.

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“…A typical rate of the sputtered material line intensity to that of the buffer gas is generally a few orders higher than that of the respective concentrations of atoms which are volunteers for excitation, which is very important, for example see van Veldhuizen [10], Oliver and Finlayson [11] and Kusano et al [12]. This surprising fact occurs in all papers concerning the cathode zone plasma and has not yet been fully explained.…”

Section: Introductionmentioning

confidence: 99%

Study of fundamental processes affecting the structure of the cathode zone of nitrogen/titanium dc discharge

Wroński

2000

J. Phys. D: Appl. Phys.

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Processes affecting the emission of the cathode zone plasma of a N 2 /Ti dc discharge were studied experimentally and theoretically. Light maxima occurring at the negative glow head (maximum II) are due to the electron-molecule excitation. Emission characteristics of this region, space distributions of lighting, dependence of the line intensity (I ) on the gas pressure (p) and current density (j d ) can be fully explained by the Monte Carlo (M-C) simulation of electron motion in this region. Emission characteristics of the space close to the cathode surface (maximum I) are complex, depending on the emitting species. Molecular lines are found to be emitted mostly due to the fast ion-N 2 interactions. The results of the analytical modelling of this process confirm the experimentally observed almost linear dependences of the intensities of these lines on the pressure and current density. Lines of atomic nitrogen are found to be due to the fast ion-N 2 interactions as well as to the fast ion-solid excitation, both accompanied by a dissociation. Particular attention was paid to the emission of sputtered material lighting in the space close to the cathode surface. This lighting results from the fast ion-sputtered atom interaction as well as from that of the sputtered atom with 'hot' atoms of the cathode surface layer. The experimentally observed dependences of the sputtered atom line intensity on the gas pressure (I ∼ 1/p) and the discharge current density (I ∼ j d × j d ) are qualitatively explained with a complex model that takes into account the analytical assessment of the energy distribution of bombarding ions, the M-C simulation of the ion-solid interaction and the M-C simulation of the motion of atoms roaming in the plasma phase. The plasma of the space close to the cathode surface (maximum I) of low-pressure discharges (∼0.1 Torr) is an effective light source for the optical emission spectroscopy of buffer gas and solid species.

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Effect of cathode-bore geometry and filler-gas pressure on the observed distribution of sputtered copper atom densities in ahollow-cathode lamp

Oliver¹,

Finlayson²

1998

J. Anal. At. Spectrom.

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Atomic absorption spectrometry has been used to probe the different regions of the cathode bore. Results obtained from techniques that rely on the spatial resolution of emissions from distribution of sputtered copper atoms in the body of a discharge cell specially constructed to reproduce the the cathode bore4 are limited by their susceptibility to linebroadening through self absorption, and by likely optical environment of a hollow-cathode lamp. Variations in the sputtered atom distribution have been characterized in terms of aberrations. The use of AAS in this work ensures that many of these problems are avoided. the absorption value at a Cartesian origin defined at the intersection of the cathode-bore axis and the top of theThe study presented here arises from the need to provide a detailed assessment of the performance of novel materials cathode bore. This value is extrapolated from the dependence of each individual absorption measurement on the proposed for use as hollow cathodes in AAS lamps. The standard pass/fail testing procedures used to assess lamp corresponding distance from the Cartesian origin. The dependence of this extrapolated value on a range of cathode-performance do not provide suitable diagnostic information that can lead to the optimization of operating parameters such bore geometries, current densities and filler-gas pressures has been investigated. This study demonstrates that absorption as bore geometry and filler-gas pressure. The aim of this work is to demonstrate a technique that provides a more detailed measurements from the region above the hollow cathode show a self-consistent sensitivity to variations in the glow discharge characterization of the distribution of the sputtered atoms in the accessible region of the hollow-cathode lamp glow dis-that result from the variation of cathode-bore geometry and filler-gas pressure. Comment is made upon the applicability of charge. If such a technique can detect variations in the concentration of sputtered atoms in the hollow-cathode bore, it can this technique to the assessment of novel cathode materials.be developed into an effective diagnostic tool that can assist

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Reconstruction of sputtered copper atom densities in a hollow-cathode glow discharge lamp

Cited by 3 publications

References 23 publications

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Study of fundamental processes affecting the structure of the cathode zone of nitrogen/titanium dc discharge

Effect of cathode-bore geometry and filler-gas pressure on the observed distribution of sputtered copper atom densities in ahollow-cathode lamp

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