2019
DOI: 10.1016/j.jhazmat.2018.09.014
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Recovery of cutting fluids and silicon carbide from slurry waste

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Cited by 23 publications
(6 citation statements)
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“…For example, Chen et al [ 168 ] developed a novel electrochemical micromembrane technology to demulsify oily wastewater and recover oil from oil-in-water cutting fluids. Similarly, Shen et al [ 169 ] presented an approach to recover cutting fluids and SiC from slurry waste. Although eco-friendly cutting fluids should be the target to move forward, the importance of maintaining the process outputs will remain.…”
Section: Process Inputsmentioning
confidence: 99%
“…For example, Chen et al [ 168 ] developed a novel electrochemical micromembrane technology to demulsify oily wastewater and recover oil from oil-in-water cutting fluids. Similarly, Shen et al [ 169 ] presented an approach to recover cutting fluids and SiC from slurry waste. Although eco-friendly cutting fluids should be the target to move forward, the importance of maintaining the process outputs will remain.…”
Section: Process Inputsmentioning
confidence: 99%
“…In the absence of filtration of the cutting fluid, impurities return to the reservoir, reducing the useful life of the pump, the cutting tool, and the cutting fluid itself [13]. The filter is a device that retains all insoluble contaminants from a fluid, is usually employed to separate solid particles from liquids [14]. It is classified into two types: chemical and mechanical.…”
Section: Introductionmentioning
confidence: 99%
“…A large amount of hazardous silicon slurry waste is generated during the slicing of silicon ingots into thin silicon wafers for the fabrication of integrated circuit chips and solar cells [7][8][9][10]. The amount of silicon waste slurry is expected to be increasing worldwide, as silicon wafer production increases.…”
Section: Introductionmentioning
confidence: 99%
“…Silicon wafer cutting slurry is mainly composed of SiC (as the abrasive), propylene glycol (as the cooling liquid), silicon (residual material after slicing) [12]. Currently, silicon slurry waste is mainly disposed of using incineration or land-filling [10,12]. It results in serious environmental damage and substantial wasting of resources, therefore, how to treat this waste becomes an important issue.…”
Section: Introductionmentioning
confidence: 99%