Cleo: 2013 2013
DOI: 10.1364/cleo_at.2013.jw2a.35
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Reduced propagation losses in quasi-phase-matched GaAs/AlGaAs waveguides

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Cited by 2 publications
(2 citation statements)
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“…We have shown that these corrugations are produced by anisotropic diffusion of III-group atoms on GaAs (100) surfaces during molecular beam epitaxy (MBE) regrowth. 25,26) To reduce the corrugation height, we optimized substrate temperature during MBE waveguide growth 27) and introduced chemical mechanical polishing (CMP) process during MBE growth process of an under cladding layer. 28) In this paper, we report propagation losses of three interacting waves and 3.4 μm QPM-DFG conversion efficiencies in periodically-inverted GaAs/AlGaAs waveguides fabricated with and without CMP.…”
Section: Introductionmentioning
confidence: 99%
“…We have shown that these corrugations are produced by anisotropic diffusion of III-group atoms on GaAs (100) surfaces during molecular beam epitaxy (MBE) regrowth. 25,26) To reduce the corrugation height, we optimized substrate temperature during MBE waveguide growth 27) and introduced chemical mechanical polishing (CMP) process during MBE growth process of an under cladding layer. 28) In this paper, we report propagation losses of three interacting waves and 3.4 μm QPM-DFG conversion efficiencies in periodically-inverted GaAs/AlGaAs waveguides fabricated with and without CMP.…”
Section: Introductionmentioning
confidence: 99%
“…Using this technique combined with MBE regrowth of GaAs and AlGaAs on periodically inverted GaAs(100) substrates by MBE growth using arsenic tetramers (As 4 ), we have fabricated periodically inverted GaAs/AlGaAs waveguiding wavelength conversion devices and demonstrated wavelength conversion via quadratic nonlinear optical effects. [6][7][8] However, the devices have suffered from propagation losses caused by corrugations on the interfaces between the guiding and cladding layers and periodic modulation of the Al composition. Anisotropic surface diffusion of Ga and Al atoms on GaAs(100) surfaces 9) is known to be responsible for generating the corrugations.…”
mentioning
confidence: 99%