2010
DOI: 10.5101/nml.v2i3.p197-203
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Reducing SU-8 hygroscopic swelling by ultrasonic treatment

Abstract: The volume expansion of SU-8 resist brings serious dimensional errors to electroformed structures. Two approaches have been proposed to reduce resist distortions during electroforming: electroforming at room temperature and adding auxiliary features for mask patterns. However, the former method induces higher internal stresses in the electroformed metal layers. And the latter method makes it difficult to predict the expansion behaviors of the resists. In the paper, the thermal expansion of the SU-8 mould is ca… Show more

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