Reduction of debris of a CO2 laser-produced Sn plasma extreme ultraviolet source using a magnetic field

Ueno, Yoshifumi; Soumagne, Georg; Sumitani, Akira; Endo, Akira; Higashiguchi, Takeshi; Yugami, Noboru

doi:10.1063/1.2938365

Cited by 39 publications

(20 citation statements)

References 13 publications

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“…12,36 The Sn deposition rate on the Mo/Si multilayer mirror depends, on the fast ion energy distribution, which is attributed to the plasma parameters originating from the laser and target parameters. 16 The fast ion number versus the magnetic field strength was evaluated from the Faraday cup signal. In the case of an applied axial magnetic field of 1 T, the Sn ion flux decreased by more than three orders of magnitude.…”

Section: B Fc Ion Analysismentioning

confidence: 99%

“…19,20 By applying a static magnetic field of 1 T a fivefold reduction in Sn debris deposited on Mo/Si multilayer mirror from a Sn planar target has been demonstrated. 16 The debris reduction is attributed to the decrease of more than three orders in the number of ions that reach the sample mirror due to their interaction with the applied magnetic field that guides the ions away from the mirror. The remaining deposition is due to neutral Sn atoms that do not interact with the applied magnetic field.…”

Section: Introductionmentioning

confidence: 99%

“…12,13 Ionized and neutral particle flux causes the sputtering and implantation of the debris species into the ML mirror coating, lowering its reflectivity. 15 Several mitigation schemes have been proposed to improve the lifetime of the ML mirror, for example, using magnetic fields, 16 a gas curtain, 17 low energy prepulses, 18 and mass-limited targets. 19,20 By applying a static magnetic field of 1 T a fivefold reduction in Sn debris deposited on Mo/Si multilayer mirror from a Sn planar target has been demonstrated.…”

Section: Introductionmentioning

confidence: 99%

“…The remaining deposition is due to neutral Sn atoms that do not interact with the applied magnetic field. 16 The effectiveness of the magnetic field ion mitigation was evaluated by measuring the erosion rate with a quartz crystal microbalance. 21 A significant decrease of the Faraday cup (FC) signal was monitored by applying a magnetic field of 0.6 T. Target size dependence on magnetic field effectiveness was observed, measured erosion rate was reduced to less than 10% by applying 0.6 T magnetic field in the case of 10-lm Xe jet and 300-mJ Nd:YAG laser irradiation.…”

Section: Introductionmentioning

confidence: 99%

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Extreme ultraviolet emission and confinement of tin plasmas in the presence of a magnetic field

et al. 2014

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We investigated the role of a guiding magnetic field on extreme ultraviolet (EUV) and ion emission from a laser produced Sn plasma for various laser pulse duration and intensity. For producing plasmas, planar slabs of pure Sn were irradiated with 1064 nm, Nd:YAG laser pulses with varying pulse duration (5–15 ns) and intensity. A magnetic trap was fabricated with the use of two neodymium permanent magnets which provided a magnetic field strength ∼0.5 T along the plume expansion direction. Our results indicate that the EUV conversion efficiency do not depend significantly on applied axial magnetic field. Faraday Cup ion analysis of Sn plasma show that the ion flux reduces by a factor of ∼5 with the application of an axial magnetic field. It was found that the plasma plume expand in the lateral direction with peak velocity measured to be ∼1.2 cm/μs and reduced to ∼0.75 cm/μs with the application of an axial magnetic field. The plume expansion features recorded using fast photography in the presence and absence of 0.5 T axial magnetic field are simulated using particle-in-cell code. Our simulation results qualitatively predict the plasma behavior.

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Section: B Fc Ion Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Extreme ultraviolet emission and confinement of tin plasmas in the presence of a magnetic field

et al. 2014

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“…(Bakshi, 2009). By applying a static B-field of about 1 T, a fivefold reduction in Sn debris deposited on small Mo/Si multilayer mirrors from an Sn planar target plasma has been demonstrated (Ueno et al, 2008). The design of a mitigation system is simulated with the computer models with general heterogeneous target systems integrated package (Sizyuk et al, 2007).…”

Section: Introductionmentioning

confidence: 99%

Collimation of laser-produced plasmas using axial magnetic field

Roy¹,

Harilal²,

Hassan³

et al. 2015

Laser Part. Beams

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We investigated the expansion dynamics of laser-produced plasmas expanding into an axial magnetic field. Plasmas were generated by focusing 1.064 μm Nd:YAG laser pulses onto a planar tin target in vacuum and allowed to expand into a 0.5 T magnetic field where the field lines were aligned along the plume expansion direction. Gated images employing an intensified charge-coupled device showed focusing of the plasma plume, which were also compared with results, obtained using particle-in-cell modeling methods. The estimated density and temperature of the plasma plumes employing emission spectroscopy revealed significant changes in the presence and absence of the 0.5 T magnetic field. In the presence of the field, the electron temperature is increased with distance from the target, while the density showed opposite effects.

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