2017
DOI: 10.1021/acsami.6b15885
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Reduction of Line Edge Roughness of Polystyrene-block-Poly(methyl methacrylate) Copolymer Nanopatterns By Introducing Hydrogen Bonding at the Junction Point of Two Block Chains

Abstract: To apply well-defined block copolymer nanopatterns to next-generation lithography or high-density storage devices, small line edge roughness (LER) of nanopatterns should be realized. Although polystyrene-block-poly(methyl methacrylate) copolymer (PS-b-PMMA) has been widely used to fabricate nanopatterns because of easy perpendicular orientation of the block copolymer nanodomains and effective removal of PMMA block by dry etching, the fabricated nanopatterns show poorer line edge roughness (LER) due to relative… Show more

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Cited by 25 publications
(21 citation statements)
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“…The termination dependent surface resonances, however, are spread over a wider termination range. This remains true for gyroid metamaterials with levels of surface roughness on the order of typical block copolymer line edge roughnesses, [27,28] S12a of the Supporting Information.…”
Section: Resultsmentioning
confidence: 89%
“…The termination dependent surface resonances, however, are spread over a wider termination range. This remains true for gyroid metamaterials with levels of surface roughness on the order of typical block copolymer line edge roughnesses, [27,28] S12a of the Supporting Information.…”
Section: Resultsmentioning
confidence: 89%
“…In order to obtain inorganic nanostructure arrays at the sub‐5 nm scale, it is essential for pattern transfer processes such as plasma etching and SIS to proceed in a controlled fashion with high selectivity, and at defined positions within the self‐assembled building blocks. The key herein will be the preparation of well‐defined supramolecular architectures with a one‐to‐one registration of molecular components or reactive sites, and extremely sharp interfaces . LC materials are ideally suited to address these challenges because, besides the sub‐5 nm periodicities, control over the chemical functionality allows for site‐selective chemistry such as crosslinking, selective swelling, or complexation .…”
Section: Future Challenge Of Sub‐5 Nm Patterning Using Liquid Crystalsmentioning
confidence: 99%
“…by promoting the phase separation between blocks, and by shifting the order-to-disorder transition in bulk systems to higher temperatures. [23][24][25][26][27] However, stimuli-responsive switchability of a functional moiety between blocks has not been explored in these applications.…”
Section: Introductionmentioning
confidence: 99%