Reduction of sidewall inclination and blast lag of powder blasted channels

Wensink, H.; Elwenspoek, Michael Curt

doi:10.1016/s0924-4247(02)00301-1

Cited by 52 publications

(89 citation statements)

References 10 publications

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“…The Pyrex (7740; Corning, New York, NY, USA) cover plate of the chip was back-etched by HF to a thickness of 167 mm. To obtain a low costly and tightly sealed connection between the exterior and the inner channels, powder blasting was used to produce the connection holes [12]. Two different microfluidic chips have been used; called chip 1 and chip 2.…”

Section: Microfluidic Chipsmentioning

confidence: 99%

The potential of autofluorescence for the detection of single living cells for label‐free cell sorting in microfluidic systems

et al. 2004

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A novel method for studying unlabeled living mammalian cells based on their autofluorescence (AF) signal in a prototype microfluidic device is presented. When combined, cellular AF detection and microfluidic devices have the potential to facilitate high-throughput analysis of different cell populations. To demonstrate this, unlabeled cultured cells in microfluidic devices were excited with a 488 nm excitation light and the AF emission (> 505 nm) was detected using a confocal fluorescence microscope (CFM). For example, a simple microfluidic three-port glass microstructure was used together with conventional electroosmotic flow (EOF) to switch the direction of the fluid flow. As a means to test the potential of AF-based cell sorting in this microfluidic device, granulocytes were successfully differentiated from human red blood cells (RBCs) based on differences in AF. This study demonstrated the use of a simple microfabricated device to perform high-throughput live cell detection and differentiation without the need for cell-specific fluorescent labeling dyes and thereby reducing the sample preparation time. Hence, the combined use of microfluidic devices and cell AF may have many applications in single-cell analysis.

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Section: Microfluidic Chipsmentioning

confidence: 99%

The potential of autofluorescence for the detection of single living cells for label‐free cell sorting in microfluidic systems

et al. 2004

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“…Microabrasive jet machining (MAJM) used finer abrasive particles and small diameter nozzle to produce smaller holes and more surface finish. Wensink and Elwenspoek [2] mentioned that when AJM is performed, inclination of sidewalls and blast lag (wide channels become deeper compared to smaller channels) were the reasons to limit the maximum aspect ratio. It was investigated that much steeper sidewalls and very less blast lag could be produced with use of MAJM.…”

Section: Introductionmentioning

confidence: 99%

Design and manufacturing of abrasive jet machine for drilling operation

Mittal

Sehgal

Kumar

2016

MATEC Web of Conferences

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Abstract-Wide application of Abrasive Jet Machine (AJM) is found in machining hard and brittle materials. Machining of brittle materials by AJM is due to brittle fracture and removal of micro chips from the work piece. Embedment of the abrasive particles in the brittle materials results in decrease of machining efficiency. In this paper design and manufacturing of AJM has been presented. Various parts of AJM have been designed using ANSYS 16.2 software. The parts are then manufactured indigenously as per designed parameters. The machine fabricated in this work will be used further for process optimization of AJM parameters for machining of glass and ceramics.

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“…The etch depth was 10 µm. A powder blasting step was performed with 30 µm in diameter Al 2 O 3 particles to create the inlet and outlet holes, as well as the electrode openings [97]. A photolithography step was carried out to transfer the pattern of the electrodes onto the surface of the bottom plate.…”

Section: Chip Fabricationmentioning

confidence: 99%

“…This foil was exposed to a UV light source and was developed in a sodium carbonate solution. After that, powderblasting is performed with Al 2 O 3 particles (30 μm particle diameter) [97] to create the inlet and outlet holes.…”

Section: Microfabricationmentioning

confidence: 99%

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Microfluidic free-flow electrophoresis for proteomics-on-a-chip

Kohlheyer¹

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Reduction of sidewall inclination and blast lag of powder blasted channels

Cited by 52 publications

References 10 publications

The potential of autofluorescence for the detection of single living cells for label‐free cell sorting in microfluidic systems

The potential of autofluorescence for the detection of single living cells for label‐free cell sorting in microfluidic systems

Design and manufacturing of abrasive jet machine for drilling operation

Microfluidic free-flow electrophoresis for proteomics-on-a-chip

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