2008
DOI: 10.1016/j.sna.2008.02.010
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Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

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Cited by 5 publications
(2 citation statements)
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“…The sample holder of the AFM on top of the scanner tube was replaced by a socket for the TO5 housing of the FSC chip. Chips from Xensor Integration, Delfgauw, The Netherlands, [43,44] mounted on a TO5 housing allowed for direct access of the sample by the AFM tip (Figure 1 and Figure 2).…”
Section: Methodsmentioning
confidence: 99%
“…The sample holder of the AFM on top of the scanner tube was replaced by a socket for the TO5 housing of the FSC chip. Chips from Xensor Integration, Delfgauw, The Netherlands, [43,44] mounted on a TO5 housing allowed for direct access of the sample by the AFM tip (Figure 1 and Figure 2).…”
Section: Methodsmentioning
confidence: 99%
“…These measurements are conducted in calorimetric microchips, in which the sample is placed on an amorphous silicon nitride membrane with a surface roughness of about 200 nm [66]. This roughness, if necessary, can be reduced by chemical etching to about 1-10 nm [67,68]. The roughness of the sample may be greater than that of the membrane at the beginning of sample melting.…”
Section: Evolution Of Thermal Contact Conductance G During the Pre-me...mentioning
confidence: 99%