1989
DOI: 10.1364/ao.28.003434
|View full text |Cite
|
Sign up to set email alerts
|

Reflection micro-Fresnel lenses and their use in an integrated focus sensor

Abstract: Blazed reflection micro-Fresnel lenses and their use in an integrated focus sensor are proposed. Theoretical analysis indicates that the optical characteristics of reflection Fresnel lenses can be improved compared with a conventional transmission micro-Fresnel lens. These reflection Fresnel lenses were fabricated using electron-beam lithography and exhibited the diffraction-limited focusing characteristics with 71% high efficiency. The focus sensor has a folded optical path and includes a beam splitter integr… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

1
18
0

Year Published

1994
1994
2015
2015

Publication Types

Select...
7
1
1

Relationship

0
9

Authors

Journals

citations
Cited by 54 publications
(19 citation statements)
references
References 3 publications
1
18
0
Order By: Relevance
“…High-NA lenses are required in microscopy, high-density data recording, focal plane arrays and coupling between on-chip photonic components and free-space beams. Current techniques to fabricate on-chip devices that impose rapid phase variation require grey-scale lithography 28,29 , a process that is difficult to control. On the other hand, the HCTA devices provide a more reliable alternative with fabrication techniques that lend themselves to wafer-scale processing.…”
mentioning
confidence: 99%
“…High-NA lenses are required in microscopy, high-density data recording, focal plane arrays and coupling between on-chip photonic components and free-space beams. Current techniques to fabricate on-chip devices that impose rapid phase variation require grey-scale lithography 28,29 , a process that is difficult to control. On the other hand, the HCTA devices provide a more reliable alternative with fabrication techniques that lend themselves to wafer-scale processing.…”
mentioning
confidence: 99%
“…(1) does not include a grating period K, and it is effective only for the condition K ) k (where k is the wavelength) because it is obtained from scalar diffraction theory. Hence, the diffraction efficiency of the first order g 1 descends rapidly in the domain of K < k [9]. Fig.…”
Section: Introductionmentioning
confidence: 82%
“…That is, in electromagnetic diå raction theory, zeroth-order diå raction can never be null even for a blazed re¯ection grating (see, e.g. ® gure 3 of [17]). If we try to shape a very short pulse with a conventional system, its frequency spectrum may be too wide to ignore this eå ect.…”
Section: Discussionmentioning
confidence: 99%