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Articles you may be interested inComparative electron temperature measurements of Thomson scattering and electron cyclotron emission diagnostics in TCABR plasmasa) Rev. Sci. Instrum. 81, 10D529 (2010); 10.1063/1.3494379 Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering Appl.A comparison of spectroscopic and Thomson scattering measurements of electron densities and temperatures in a transient expanding plasma flow Electron temperature T, and density n, in the source region of an electron cyclotron resonance discharge have been measured by incoherent Thomson scattering of the beam from a 0.5 J yttrium aluminum garnet laser. This is the first experiment in which this technique, routinely used on fusion plasmas, has been applied to a processing plasma. Measurements were made in an argon discharge at pressures from 0.3 to 2 mTorr and microwave powers from 250 to 1000 W. Velocity distributions were measured both parallel and perpendicular to the magnetic field and a slight anisotropy of electron temperature was observed for low-pressure discharges. Temperatures in the range of l-5 eV and densities in the range of 2-10x 10" rnd3 were measured. T, and n, were found to strongly depend on pressure but only weakly on the input power and discharge magnetic field. No deviations from a Maxwellian velocity distribution were observed.

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Antiferroelectric PbZrO3 thin films have been fabricated by a multi-ion-beam sputtering technique at a substrate temperature as low as 415 °C. Single crystal perovskite PbZrO3 films oriented along the a axis could be epitaxially grown on (100)MgO, (100)Pt/MgO substrates using a PbTiO3 buffer layer. The PbZrO3 films achieved high dielectric constants of about 400, which are almost 2.4 times larger than that of bulk PbZrO3. The measurements of D–E hysteresis loops and Curie temperature demonstrated the antiferroelectric to ferroelectric phase transition of PbZrO3 films with a thickness of 1770 Å, while for PbZrO3 films of 875 Å the phase transition could not be clearly observed.

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