Reflection of Light by a System of Nonabsorbing Isotropic Film–Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries

Analysis of variable scale surface roughness on Si(111): a comparative Brewster angle, ellipsometry and atomic force microscopy investigation

“…[16][17][18][19][20][21][22][23][24][25][26][27] Roughness on a length scale that is very small compared with the wavelength of light (l) can be treated theoretically by the effective medium theory 27 and has been extremely successful over decades. In this model the rough surface is replaced by a smooth boundary layer of thickness d with a dielectric constant that is calculated by a mix of the two media involved …”

“…There is a rich literature regarding the incorporation of roughness analyses into optical analysis data, [16][17][18][19][20][21][22][23][24][25][26][27] mainly applied to the interpretation of ellipsometry. In principle, two roughness regimes might be distinguished: (i) topographic changes with a correlation length below the probing wavelength and (ii) longer range topographic fluctuations.…”

“…The former is usually described using effective medium approximation theory (EMA) 27 whereas for the latter, uncertainties for an appropriate description exist. 17,18,[23][24][25] BAA has so far been used for defect identification in semiconductors 14,15 and for single wavelength analysis during chemical pulsed beam epitaxy 28,29 where monolayer sensitivity could be attained. It measures the optical constants via the value of the Brewster angle and the reflectivity in this angle.…”

Dielectric Function of Nitride Semiconductors: Recent Experimental Results

“…The scattered l ight i s no t detected and hence the measured reÛectance (R ) of a ro ug h opaque substra te i s sma ller tha n tha t ( R s ) of a sm ooth substra te. Cal cul ati ons under general assumpti ons about the shap e of surf ace i rreg ul ari ti es lead to a rel ati on [45,46] ( 1 4) where n a is the refra cti ve i ndex of an am bient. The form ul a all ows the correcti on of experi m ental R -spectra in order to get R s once kno wi ng £ f or exam pl e f rom AFM m easurem ents.…”

Probability distribution of transmission coefficients of plane waves through random stack medium

“…The idea of stacking randomly modulated slabs can be interpreted as a multi-layered approximation [13,14] of continuous media, but which may be directly related to systems with multi-layered structure such as sedimentary basin (e.g., [15][16][17][18]) and optical thin films [19].…”