Reflective optics for EUV/x-ray sources at Thales SESO: possibilities and perspectives

Peverini, Luca; Guadalupi, Henry; Michel, Thomas; Perrin, Sylvain; Nevière, Rémi; Jeu, Christian du

doi:10.1117/12.2570604

Cited by 2 publications

(2 citation statements)

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“…For example, Peverini et al reported their achievements in the fabrication of high-precision flat mirrors and ellipsoid mirrors using IBF. A very low figure error of 1 nm RMS was obtained on a 1.2 m long mirror, and a 0.2 μrad slope error has been achieved on a large ellipsoid mirror with highly curved surface [10].…”

Section: Introductionmentioning

confidence: 88%

High-Precision Ion Beam Figuring of X-Ray Plane Mirrors for the Bendable KB Focusing System

et al. 2022

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Two trapezoidal plane mirrors of 240 mm in length were fabricated by ion beam figuring (IBF) technology for application in a bendable KB focusing system. The correction of surface height and slope errors in different spatial frequency ranges of the mirrors was studied systematically. After one to two iterations of IBF, the figure height errors of the vertical focusing mirror (VFM) and horizontal focusing mirror (HFM) were improved from 32.4 and 65.4 nm to 2.7 and 7.2 nm (RMS), respectively. If the best-fit sphere of the surface profile was subtracted, the residual two-dimensional height errors were only 1.1 and 1.2 nm (RMS). The slope errors in the low spatial frequency range were corrected much faster than the middle frequency ones (f = ∼1 mm−1), which make the low-frequency slope error much smaller. After IBF, the two-dimensional slope errors of the two mirrors calculated with a spatial interval of 1 and 10 mm were reduced to approximately 0.29 and 0.08 μrad, respectively. Full spatial frequency characterization of the VFM before and after IBF showed that the low-frequency figure errors (f < 1 mm−1) were significantly reduced while the middle- and high-frequency morphologies (f > 1–2 mm−1) remain almost the same as before figuring. The fabricated plane mirrors were applied in the hard X-ray micro-focusing beamline in the Shanghai Synchrotron Radiation Facility (SSRF), which realized a focal spot of 2.4 μm × 2.8 μm at 10 keV.

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Section: Introductionmentioning

confidence: 88%

High-Precision Ion Beam Figuring of X-Ray Plane Mirrors for the Bendable KB Focusing System

et al. 2022

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“…Following the development and maturation of IBF for figuring EUV mirrors, there was an interest from the X-ray community in adopting the technique for high-quality finishing of X-ray mirrors -particularly curved mirrors, due to its superior handling of edges. Notable companies such as ZEISS (Thiess et al, 2010) and Thales SESO (Peverini et al, 2020) also began to employ IBF as a finishing step on their mirrors, enabling production of extremely high-quality X-ray mirrors. In particular, Thales SESO reported in 2020 the use of IBF to produce a 200 mm mirror with a 1D slope error of below 100 nrad, which is a crucial milestone of optical quality in the X-ray regime.…”

Section: Development Of Ibf: From the 1980s To Present Daymentioning

confidence: 99%

Ion beam figuring for X-ray mirrors: history, state-of-the-art and future prospects

Shurvinton,

Wang,

Pradhan

et al. 2024

J Synchrotron Radiat

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Synchrotron light sources require X-ray optics with extremely demanding accuracy for the surface profile, with less than 100 nrad slope errors and sub-nanometre height errors. Such errors are challenging to achieve for aspheres using traditional polishing methods. However, post-polishing error correction can be performed using techniques such as ion beam figuring (IBF) to improve optics to the desired quality. This work presents a brief overview of the history of IBF, introduces some of the challenges for obtaining such demanding figure errors, and highlights the work done at several in-house IBF facilities at synchrotron light sources worldwide to obtain state-of-the-art optical quality.

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Reflective optics for EUV/x-ray sources at Thales SESO: possibilities and perspectives

Cited by 2 publications

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High-Precision Ion Beam Figuring of X-Ray Plane Mirrors for the Bendable KB Focusing System

High-Precision Ion Beam Figuring of X-Ray Plane Mirrors for the Bendable KB Focusing System

Ion beam figuring for X-ray mirrors: history, state-of-the-art and future prospects

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