Reflexionselektronenbeugungsuntersuchungen an HV‐aufgedampften CdSe‐Schichten auf CaF₂

Abstract

Reflexionselektronenbeugungsuntersuchungen an HV-aufgedampften CdSe-Schichten auf CaF,Reflection electron diffraction investigations were performed with high vacuum deposited films of CdSe on to air cleaved (111) planes of CaF,. Together there occur the cubic (111) orientation and the hexagonal (0001) orientation. At lower substrate temperatures (440 "C) the cubic phase dominates. At higher substrate temperatlures (600 "C) the hexagonal phase is predominant.Twins and multiple twins are observed in all films. Along the (111) directions of the twins and multiple twins, respectively, additionally there occur hexagonal stacking sequences. With increasing film thickness multiple twins become less frequently. A strong increasing of the deposition rate (80 -8-l) increases the content of defects in the films (polycrystalline fractions). The appearance of satellite spots in transmission electron diffraction patterns and in reflection electron diffraction patterns will be discussed.