“…Furthermore, the epitaxial layers of the entire structure are laterally surrounded by a benzocyclobutene (BCB) dielectric confinement layer, and a 200 nm nitride (SiN x ) layer is inserted between them to improve adhesion. The refractive indexes of air, BCB, SiNx, active region, In 0.23 Ga 0.77 As and In 0.23 (Al 0.5 Ga 0.5 ) 0.77 As are set to be 1.0, 1.54 2.0, 3.40, 3.39 and 3.18 [27][28][29][30], respectively. In addition, the boundary conditions in the simulation are set to a perfectly matched layer (PML) and the maximum mesh steps are all set to be 0.02 µm.…”