2013
DOI: 10.2971/jeos.2013.13010
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Refractive index determination of SiO2 layer in the UV/Vis/NIR range: spectrophotometric reverse engineering on single and bi-layer designs

Abstract: In this paper we use spectrophotometric measurements and a Clustering Global Optimization procedure to determine the complex refractive index of SiO 2 layer from 250 nm to 1250 nm. A special commercial optical module allows the reflection and transmission measurements to be made under exactly the same illumination and measurement conditions. We compare the index determination results obtained from two different single layer SiO 2 samples, with high and low index glass substrates, respectively. We then determin… Show more

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Cited by 231 publications
(95 citation statements)
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“…A 3D parameter plot of NP-GaN as a comparison with other photonic materials. [24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39] The NP-GaN system introduces a new material tunability in photonic engineering among high quality and electrically desirable material systems as signified in the light blue cubic region. ASSOCIATED CONTENT 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 HUbp_eZukcfeYFAIiH9s74DklA&e= .…”
mentioning
confidence: 99%
“…A 3D parameter plot of NP-GaN as a comparison with other photonic materials. [24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39] The NP-GaN system introduces a new material tunability in photonic engineering among high quality and electrically desirable material systems as signified in the light blue cubic region. ASSOCIATED CONTENT 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 HUbp_eZukcfeYFAIiH9s74DklA&e= .…”
mentioning
confidence: 99%
“…Here, models were established to calculate the reflection spectra for air holes in surrounding media of each material for the TM mode with N ¼ 15, and wavelength-dependent dielectric functions were implemented. 50,51 Figures 8(a) and 8(b) show the results of varying P for each material. As was the case for air holes in GaAs, λ peak , the wavelength of the reflection peak is redshifted for increasing P. A comparison between the peak shifts for each material is shown in Fig.…”
Section: Conclusion and Discussionmentioning
confidence: 99%
“…The material of microstructure is isotropic SiO 2 with refractive index reported in Gao et al . (). Isotropic Si is selected as the substrate and its refractive index is from Jellison ().…”
Section: Measurement Principlementioning
confidence: 97%