Regularities of Al layer structure formation near phase equilibrium in plasma-condensate system

Abstract

-A fundamentally new technological approach to creating porous metal structures on isotropic substrates during condensation of a reverse diffusion flow in a planar dc magnetron is proposed. The physical foundations of the operation of self-organized sputtering systems are analyzed. Conditions of the formation of main varieties of porous structures, such as weakly coupled micro-and nanocrystals, and three-dimensional labyrinth structures, are found using scanning electron microscopy. It is established that the main prerequisites for the formation of pores are the stationarity of the process and proximity to the phase equilibrium in the plasma-condensate system. PACS numbers: 68.55.-a, 81.15.Ef

Effect of Decrease in a Threshold of Percolation in Ultrathin Films of Silver at Quasi-Equilibrium Condensation and Action of Plasma on a Growth Surface

“…В цьому випадку передача надлишкової енергії від частинок плазми до адатомів, додатковий розігрів ростової поверхні плаз-мою, а також надлишкова енергія осаджуваних атомів в значній мірі підвищують ймовірність повторного ревипаровування адато-мів. Раніше ми зазначали [15][16][17][18][19][20][21][22][23][24][25][26][27][28][29], що врахувати дію плазми на по-верхню росту можна шляхом зниження Е d до ефективного значен-ня. При цьому конденсація зворотних парових потоків має свої від-мітні особливості, які визначаються відсутністю автономного на-грівача підложжя 6 та дією на ростову поверхню більш енергетич-них йонів плазми.…”

Self-organization of plasma-condensate quasi-equilibrium systems

“…According to expressions (4), an increase in the total concentration N i of ions in the accumulation system leads to a decrease in the Debye screening length λ, which, in turn, results in a decrease in the steadystate supersaturation (expression (30)).…”

“…The development of nanotechnologies associated with the condensation of matter comes to the solution of two main problems: the maintenance of the steadystate regime of condensation, on the one hand, and the creation of conditions close to the phase equilibrium, on the other hand [1][2][3][4]. Owing to the sensitivity of quasi-equilibrium condensation to the choice of technological parameters, the former problem is solved by providing a constant supersaturation.…”

“…The aim of this study is to elucidate the mechanism of the self-organization process underlying the experimental technique developed in our earlier works [1][2][3][4]. In Section 2, we show that the sputtering system involving the anode with a built-in magnet and the hollow cathode with a substrate located in its inner part makes it possible to produce a concentrated plasma (in the vicinity of the growth surface) that provides the steadystate condensation of adatoms characterized by a low supersaturation.…”

“…Therefore, we are based on the scheme according to which the self-organization is ensured by the natural course of the condensation process, so that its quasi-equilibrium state is achieved by the presence of the plasma increasing the effective temperature of the growth surface [1][2][3][4].…”