-The steady-state regime of condensation under conditions close to the phase equilibrium is shown to be provided by the self-organization of the plasma-condensate system. This self-organization is associated with the fact that the presence of the plasma leads to a considerable increase in the energy of adatoms and, hence, in the temperature of the growth surface in the course of their condensation. The increase in the temperature is compensated by the desorption flow of adatoms responsible for the supersaturation. It is demonstrated that the proximity of the system to the phase equilibrium ensures the selective regime of condensation during which the adatoms are attached onto active centers of the growth surface, thus forming various three-dimensional structures.

-A fundamentally new technological approach to creating porous metal structures on isotropic substrates during condensation of a reverse diffusion flow in a planar dc magnetron is proposed. The physical foundations of the operation of self-organized sputtering systems are analyzed. Conditions of the formation of main varieties of porous structures, such as weakly coupled micro-and nanocrystals, and three-dimensional labyrinth structures, are found using scanning electron microscopy. It is established that the main prerequisites for the formation of pores are the stationarity of the process and proximity to the phase equilibrium in the plasma-condensate system. PACS numbers: 68.55.-a, 81.15.Ef

Mechanisms of the self-organization of nanosystems at the condensation of the extremely weak steady flows of copper vapors obtained in magnetron sputtering in an ultrapure argon are studied. It is shown that the freeenergy minimization near equilibrium condensation creates prerequisites for the self-organization of statistically homogeneous layers of nanoclusters and determines the transition to the formation of nanosystems in the form of fractal networks.