Regularized multiframe phase-shifting algorithm for three-dimensional profilometry

Deng, Fuqin; Sze, Wui Fung; Deng, Jiangwen; Fung, Kenneth S. M.; Leung, Wing Wa; Lam, Edmund Y.

doi:10.1364/ao.51.000033

Cited by 11 publications

(6 citation statements)

References 23 publications

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“…7 These illumination-coded approaches can be implemented by an add-on projection grating, an LCD or a DLP projector, and they provide an efficient full-field surface profilometry method for metrology applications. 8 However, like other triangulation-based 3D metrology techniques, these structured-light methods fail at the occluded regions. 9 To eliminate the occlusion problem by triangulation-based 3D reconstruction techniques, shape-from-focus (SFF) provides a powerful means of recovering the shapes of rough surfaces, 10 but for general surfaces with sudden height variations, the accuracy of depth around the edge is seriously degraded by the out-of-focus light from the neighboring points.…”

Section: Overview Of Non-contact Optical 3d Reconstruction and Metrologymentioning

confidence: 99%

An edge-from-focus approach to 3D inspection and metrology

et al. 2015

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Section: Overview Of Non-contact Optical 3d Reconstruction and Metrologymentioning

confidence: 99%

An edge-from-focus approach to 3D inspection and metrology

et al. 2015

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“…Our approach uses structured light, which has demonstrated advantages in being able to reconstruct object surfaces efficiently and effectively, even for the textureless ones [16]. Often, the source is a sinusoidal pattern, but other forms have also been investigated [17], [18].…”

Section: A Related Workmentioning

confidence: 99%

A three-dimensional imaging system for surface profilometry of moving objects

Deng

Liu

Deng

et al. 2013

2013 IEEE International Conference on Imaging Systems and Techniques (IST)

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Non-contact optical imaging system design and the corresponding surface profilometry algorithm are critical components in various metrology applications, such as surface inspection of semiconductor components on the production line. For such challenging industrial applications, the most important considerations are often automation, precision and speed of the inspection. In this work, we propose a mathematical framework and a dynamic phase-shift algorithm (D-PSA) for a dense surface profilometry of moving objects. We also present a fringe pattern projection system with projector and camera arrays, with an aim to reduce the undesirable effects such as the uneven illumination and the perspective geometry effect on the reconstructed surface using a large field-of-view inspection system. This system is then applied to the inspection of the surface of moving printed circuit boards along a conveyor belt. Experimental results show that our approach can reconstruct the object surface effectively and efficiently.

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“…Methods have been proposed for ideal fringe-pattern generation and projection [5][6][7], phase calculation [8] and unwrapping [9][10][11][12], phase error analysis and correction [3,13,14], and system calibration [15][16][17] to improve the speed and accuracy [6,18,19]. But to obtain high accuracy, more frames of the fringe image or complicated algorithm are needed so that the measurement precision and speed are still mutual constraints [20]. Relative measurement accuracy can be improved to 1∕10; 000 [18], which satisfies laboratory situations that require relatively fast and large-scale 3D data with low accuracy (e.g., reverse engineering and security systems).…”

Section: Introductionmentioning

confidence: 99%

High-speed scanning stroboscopic fringe-pattern projection technology for three-dimensional shape precision measurement

et al. 2014

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A high-speed scanning stroboscopic fringe-pattern projection system is designed. A high-speed rotating polygon mirror and a line-structured laser cooperate to produce stable and unambiguous stroboscopic fringe patterns. The system combines the rapidity of the grating projection with the high accuracy of the line-structured laser light source. The fringe patterns have fast frame rate, great density, high precision, and high brightness, with convenience and accuracy in adjusting brightness, frequency, linewidth, and the amount of phase shift. The characteristics and the stability of this system are verified by experiments. Experimental results show that the finest linewidth can reach 40 μm and that the minimum fringe cycle is 80 μm. Circuit modulation makes the light source system flexibly adjustable, easy to control in real time, and convenient to project various fringe patterns. Combined with different light intensity adjustment algorithms and 3D computation models, the 3D topography with high accuracy can be obtained for objects measured under different environments or objects with different sizes, morphologies, and optical properties. The proposed system shows a broad application prospect for fast 3D shape precision measurements, particularly in the industrial field of 3D online detection for precision devices.

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Regularized multiframe phase-shifting algorithm for three-dimensional profilometry

Cited by 11 publications

References 23 publications

An edge-from-focus approach to 3D inspection and metrology

An edge-from-focus approach to 3D inspection and metrology

A three-dimensional imaging system for surface profilometry of moving objects

High-speed scanning stroboscopic fringe-pattern projection technology for three-dimensional shape precision measurement

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