Relation of PID well to gate antenna charging effects

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Relation of PID well to gate antenna charging effects

Cited by 9 publications

References 17 publications

Reliability characterisation of plasma induced charging damage (PID) for MOS transistors of a silicon on insulator (SOI) process using product relevant test structures and fWLR methods

Reliability characterisation of plasma induced charging damage (PID) for MOS transistors of a silicon on insulator (SOI) process using product relevant test structures and fWLR methods

Plasma induced charging damage (PID) from well charging in a BCD technology with deep trenches causing MOS device reliability lifetime degradation

Plasma Induced Damage Test Methodology applied to a 3D Vertical NAND Memory Technology

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