Reliability of Barium Strontium Titanate (Bst) Thin Films

XPS depth profiling of functional materials: applications of ion beam etching techniques

“…Similarly, the CdS thin film 51 and a porous organosilane film 52 were etched by Ar + MAIB beam to explore the uniform distribution of species in the bulk. Besides, the polymetallic compound thin film, such as Ba(Zr x Ti 1− x )O 3 thin films, 53 perovskite, 54 barium strontium titanate thin films, 55 barium strontium titanate film, 55 and silver-implanted diamond complex film 56 were also analyzed using an XPS technique combined with Ar + MAIB sputtering method.…”

Improved Ferroelectric Phase Shifter by Inserting Spiral Inductors into Ground

“…Therefore, low loss and low cost microwave phase shifters are required to improve performance and reduce the cost of phase arrays to ensure widespread application. BaSrTiO 3 (BST) thin films have been investigated as a potential low cost voltage tunable element for microwave circuit applications because of their high tunability, relatively low loss, and fast switching speed [1][2][3][4][5][6][7]. At present, several groups have implemented phase shifters using BST thin films [8][9][10][11][12][13].…”